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成分调控对磁控溅射AlCrNbSiTi高熵合金涂层的结构及性能影响研究

Effect of Composition Regulation on the Structure and Properties of AlCrNbSiTi High-Entropy Alloys Coatings by Magnetron Sputtering
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摘要 高熵合金(HEAs)涂层因其优异的力学性能、耐磨性能、耐腐蚀性能以及抗高温氧化性能等成为防护涂层的潜在候选材料。然而,HEAs涂层不同元素间的相互作用及协同机理尚不清楚。为研究高熵合金涂层不同元素间的相互作用和协同机理,采用磁控溅射技术利用不同成分的靶材制备了4种不同成分比的AlCrNbSiTi高熵合金涂层,并利用SEM、AFM、EDS、XRD、球盘式摩擦实验机和电化学工作站详细研究了涂层的形貌、化学成分、结构、力学性能和电化学腐蚀行为。试验结果表明,Cr含量的提高会导致涂层原子尺寸差异增大,降低涂层内部排列的有序性;Cr含量和Nb含量的提高有利于强化涂层的划痕韧性,大幅降低涂层的磨损率;涂层内部Ti原子可以在钝化膜/溶液界面及涂层/钝化膜界面上提供双层保护机制,提高钝化膜的稳定性,从而强化涂层耐腐蚀性能。 High-entropy alloys(HEAs)coatings have emerged as potential candidate materials for protective coatings due to their excellent mechanical properties,wear resistance,corrosion resistance,and high-temperature oxidation resistance.However,the interactions and syner-gistic mechanisms among the different elements in HEAs coatings remain unclear.To investigate the interactions and synergistic mechanisms a-mong the different elements in high-entropy alloys coatings,four AlCrNbSiTi HEAs coatings with different compositional ratios were fabricated via magnetron sputtering using targets of varying composition.In addition,the coatings were thoroughly characterized by SEM,AFM,EDS,XRD,ball-on-disc tribometer and electrochemical workstation to investigate their morphology,chemical composition,structure,mechanical properties and electrochemical corrosion behavior.Results showed that the increase in Cr content resulted in a greater atomic size difference within the coating,thereby reducing the degree of ordered arrangement in its internal structure.The increase in Cr and Nb contents contributed to enhancing the scratch toughness of the coating and significantly reducing its wear rate.Furthermore,Ti atoms within the coating were found to provide a dual-layer protection effect on both the passive film/solution interface and the coating/passive film interface,which enhanced the stability of the passive film and consequently improved the corrosion resistance of the coating.
作者 刘杰 刘琰 杨兵 LIU Jie;LIU Yan;YANG Bing(School of Power&Mechanical Engineering,Wuhan University,Wuhan 430072,China;Hubei JiuFengShan Laboratory,Wuhan 430072,China)
出处 《材料保护》 2025年第11期1-10,共10页 Materials Protection
基金 国家自然科学基金(52371073)。
关键词 高熵合金涂层 磁控溅射 成分调控 微观结构 力学性能 耐腐蚀性 high-entropy alloys coatings magnetron sputtering composition regulation microstructure mechanical properties corrosion resistance
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