摘要
针对传统光学自成像式位移传感器不具备光学自细分功能的问题,设计了基于二维幅值交叉光栅的双层光栅位移检测系统,在不改变电路等输出系统的前提下,用衍射平面波理论分析了单层二维幅值交叉光栅的衍射特性,通过FDTD有限时域仿真法对双层光栅面内位移测量结构进行了模拟仿真。结果表明:基于二维位错结构的光栅位移测量系统,在上、下层光栅面内相对位移时,可实现单个光栅周期内光强总透射率2倍自细分的效果。该方法可以有效提高位移检测分辨率,可用于集成化高性能微位移传感器件与系统等应用。
To address the issue of traditional optical self-imaging displacement sensors lacking optical self-subdivision functionality,a dual-layer grating displacement detection system based on a two-dimensional amplitude-modulated crossed grating has been designed,without altering the output systems such as circuits.The diffraction characteristics of a single-layer two-dimensional amplitude-modulated crossed grating are analyzed using the diffraction plane wave theory.Through Finite-Difference Time-Domain(FDTD)simulation,the in-plane displacement measurement structure of the dual-layer grating is simulated.The results indicate that the displacement measurement system based on a two-dimensional dislocation structure,with relative displacement between the upper and lower grating layers in-plane,achieves a doubling of the total transmittance within a single grating period,effectively realizing self-subdivision.This method can significantly enhance the resolution of displacement detection and is applicable to integrated high-performance micro-displacement sensor devices and systems,among other applications.
作者
马霄琛
李孟委
景宁
张梦迪
辛晨光
MA Xiaochen;LI Mengwei;JING Ning;ZHANG Mengdi;XIN Chenguang(School of Instrument and Electronics,North University of China,Taiyuan 030051;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051;School of Information and Communication Engineering,North University of China,Taiyuan 030051)
出处
《舰船电子工程》
2025年第8期190-193,共4页
Ship Electronic Engineering
基金
国家自然科学基金项目(编号:62375247)资助。
关键词
光学位移传感器
光学自细分
二维幅值交叉光栅
纳米光栅
仿真
optical displacement sensor
optical self-subdivision
two-dimensional amplitude cross grating
nano-gratings
simulation
