摘要
采用溶剂热法和煅烧合成了金属有机框架(MOF)衍生Pd修饰的SnO_(2)复合材料,以此为基础制作了纯SnO_(2)和一系列Pd/SnO_(2)气体传感器。使用X射线衍射仪、场发射扫描电子显微镜和X射线光电子能谱仪对样品进行表征,结果显示Pd的修饰使复合材料中氧空位含量有所增加,而复合材料的晶相结构及形貌未发生显著变化。气敏测试结果表明,Pd/SnO_(2)-0.2%传感器在160℃下对50×10^(-6)体积分数的三乙胺(TEA)的响应为700,并且可以快速响应(3s),同时具有良好的选择性和较低的检测限(1×10^(-6)),其优异的气敏性能归因于Pd的催化作用和溢出效应。本研究结果可为高性能TEA气体传感器研究提供参考。
A metal-organic framework(MOF)derived Pd modified SnO_(2)composite material was synthesized by solvothermal method and calcination.Based on this,pure SnO_(2)and a series of Pd/SnO_(2)gas sensors were fabricated.The samples were characterized by X-ray diffractrometer,field emission scanning electron microscope and X-ray photoelectron spectrometer.The results show that Pd molification increases the oxygen vacancy content in the composite material without causing significant change in the crystal structure and morphology of the composite material.Gas sensing test results show that the Pd/SnO_(2)-0.2%sensor has a response of 700 to 50×10^(-6)volume fraction triethylamine(TEA)at 160℃,and can respond quickly(3 s),while also having good selectivity and low detection limit(1×10^(-6)).The excellent gas sensing performance of the sensor is attributed to the catalytic and spillover effects of Pd.The research results can provide reference for research on high-performance TEA gas senIsors.
作者
王振宇
丁海珍
王渝鑫
郭子政
谭烁君
赵静
Wang Zhenyu;Ding Haizhen;Wang Yuxin;Guo Zizheng;Tan Shuojun;Zhao Jing(Sechool of Chemical Engineering,0cean and Life Sciences,Dualian University of Technology,Panjin 124221,China;Aim Honesty iopharm aceut ical Co.,Ltd.,Dalian 116000,China)
出处
《半导体技术》
北大核心
2025年第11期1107-1113,共7页
Semiconductor Technology
