摘要
双动镜平动式和双动臂旋转式干涉仪虽能较好地降低动镜倾斜的影响,但现有研究未能明确两者的差异特征,导致在高精度场景中常因性能误判而选型错误。该文通过构型对比揭示了两类干涉仪差异,设计了功能和尺寸近似的两类干涉仪,其中,平动式干涉仪尺寸为443.546 mm×243.773 mm,旋转式干涉仪的尺寸为387.546 mm×300 mm。模拟了动镜倾斜情况下的干涉范围,其中,平动式干涉仪的动镜倾斜角与调制深度呈负相关,旋转式干涉仪可通过延长反射镜尺寸来消除调制深度降低的影响;推导了临界安装误差阈值,平动式干涉仪的动镜倾斜角≤0.39″,安装误差角≤0.1″,旋转式干涉仪的动镜倾斜角≤0.23″,安装误差角≤0.066″。所得差异量化结果为不同环境下干涉仪的构型选择提供了直接判据,可有效规避传统“经验驱动”设计模式导致的性能损失风险。
Although both double-moving-mirror translation interferometers and double-arm rotary interferometers can effectively mitigate the influence of mirror tilt,existing studies have failed to clarify their differential characteristics,leading to frequent performance misjudgment and selection errors in high-precision scenarios.This study reveals the differences between the two configurations through comparative analysis.Two functionally and dimensionally analogous interferometers were designed,and the size of translation interferometer was 443.546 mm×243.773 mm,while that of rotary interferometer was 387.546 mm×300 mm.The interference ranges under mirror tilt conditions were simulated.Results indicate that the tilt angle of the moving mirror in the translation interferometer negatively correlates with the modulation depth.In contrast,the rotary interferometer can compensate for modulation depth reduction by extending reflector dimensions.Critical installation error thresholds were derived.For the translation interferometer,the permissible moving mirror tilt angle was≤0.39″and installation error angle was≤0.1″,while for the rotary interferometer,these values were≤0.23″and≤0.066″,respectively.The quantified differences could provide direct criteria for selecting interferometer configurations in diverse environments,effectively mitigating the performance loss risks caused by traditional experience-driven design paradigms.
作者
任万杰
毛冲冲
赵建泉
张江浩
孙逊
REN Wanjie;MAO Chongchong;ZHAO Jianquan;ZHANG Jianghao;SUN Xun(School of Electronics and Information Engineering,University of Information Science and Technology,Nanjing 210044,China;Jinan Military Representative Office of Army Equipment Department,Jinan 250021,China;Shandong Institute of Non-Metallic Materials,Jinan 250031,China;Key Laboratory of High Efficiency and Clean Mechanical Manufacture of Ministry of Education,School of Mechanical Engineering,Shandong University,Jinan 250061,China)
出处
《应用光学》
北大核心
2025年第5期988-995,共8页
Journal of Applied Optics
基金
某装备发展部项目
山东省自然科学基金(ZR2024QB182)。
关键词
干涉仪
动镜倾斜
调制深度
安装误差
interferometer
moving mirror tilt
modulation depth
installation error
