摘要
为进一步提高转台的测角精度,通过多读数头优化布局对圆光栅测角误差辨识技术进行了研究。首先,对圆光栅测角误差进行了分析,建立了圆光栅测角误差数学表达模型;其次,分析了基于等分平均法及傅里叶法的圆光栅测角误差自校准辨识方法,构建了基于傅里叶法的多读数头误差辨识模型,提出了基于双读数头及3读数头优化布局的自校准方案;最后,进行了圆光栅误差辨识实验,搭建了多组读数头布局的实验平台,并进行了误差读数头自校准实验。实验结果表明双读数头傅里叶法和3读数头傅里叶法误差标定结果均为-2.7″~0.5″,误差差值范围为0″~0.015″,其中主要包含6阶傅里叶分量,3读数头傅里叶法能够辨识除40n阶以外的误差分量,误差辨识效果优于6读数头均匀分布傅里叶法。
In order to further improve the angle measurement accuracy of the turntable,the angle measurement error identification technology of the rotary grating was studied by optimizing the layout of multi-reading heads.Firstly,the angle measurement error of angle grating was analyzed,and the mathematical expression model of angle measurement error of angle grating was established.Secondly,the self-calibration identification methods of the circular grating angular measurement error based on the equal division averaging method and the Fourier method were analyzed,and a multireader error identification model based on the Fourier method was constructed.A self-calibration scheme based on the optimized layout of dual and triple readers was proposed.Finally,the circular grating error identification experiments were carried out.An experimental platform with multiple reader layouts was built,and the self-calibration experiments of the error readers were conducted.The experimental results showed that the error calibration results of the dual-read-head Fourier method and the triple-read-head Fourier method were both-2.7″to 0.5″,with the error difference range being 0″to 0.015″.The main component was the sixth-order Fourier component.The triple-read-head Fourier method could identify error components except for the 40n order,and its error identification effect was superior to that of the six-read-head evenly distributed Fourier method.
作者
何韬
李强
杜坤
余泓宇
夏仰球
HE Tao;LI Qiang;DU Kun;YU Hongyu;XIA Yangqiu(Institute of Machinery Manufacturing Technology,Chinese Academy of Engineering Physics,Mianyang,Sichuan 621900,China;National Machine Tool Production Quality Supervision Testing Center(Sichuan),Chengdu,Sichuan 610200,China)
出处
《计量学报》
北大核心
2025年第9期1315-1323,共9页
Acta Metrologica Sinica
基金
国防科工局技术基础科研(J0133-2224-FJC)。
关键词
几何量计量
测角精度
误差辨识
优化布局
圆光栅
读数头
自校准
geometrial metrology
angular accuracy
error identification
optimized layout
circular grating
reading head
self-calibration
