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一种正弦表面粗糙度样板的模型化测量与表征方法

A Modeling Measurement and Characterization Method for Sinusoidal Surface Roughness Template
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摘要 针对正弦表面粗糙度样板的参数标定,提出了一种模型化测量方法,以多周期总体最小二乘拟合方法给出总体幅度、周期、失真度等总体性指标参量,并进行偏差失真的规律总结分析,以及偏差失真的峰值定位;以单周波正弦最小二乘拟合方法给出局部幅度、周期、失真度等局部指标参量,并以滑动模型方式给出局部指标参量的变化情况,用于均匀度分析和统计特性分析。在正弦表面粗糙度样板上的一组真实实验结果,验证了所述方法的正确性和可行性,可用于正弦表面粗糙度样板的参量定标和质量改进评价。 A modeling measurement method is proposed for the parameter calibration of sinusoidal surface roughness templates.The multi period sine wave overall least squares fitting method is used to provide overall indicators such as amplitude,period,and distortion.The rules of deviation distortion are summarized and analyzed,and the peak of deviation distortion is located;Using the single cycle sine wave least squares fitting method to provide local index parameters such as local amplitude,period,and distortion,and using a sliding model to provide changes in local index parameters for uniformity analysis and statistical property analysis.A set of real experimental results on a sinusoidal surface roughness template verified the correctness and feasibility of the method described in this paper,which can be used for parameter calibration and quality improvement evaluation of sinusoidal surface roughness templates.
作者 梁志国 甘晓川 梁家奕 LIANG Zhiguo;GAN Xiaochuan;LIANG Jiayi(National Key Laboratory of Science and Technology on Metrology and Calibration,Changcheng Institute of Metrology and Measurement,Beijing 100095,China;School of Information and Software Engineering,University of Electronic Science and Technology of China,Chengdu,Sichuan 611700,China)
出处 《计量学报》 北大核心 2025年第9期1300-1306,共7页 Acta Metrologica Sinica
关键词 几何量计量 表面粗糙度 样板 最小二乘拟合法 检定 校准 测试 geometrial metrology surface roughness roughness specimens least squares fitting method verification calibration test
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