摘要
建立了基于三坐标测量机(CMM)的接触式非球面透镜面形检测系统,对光轴方向与顶点确定、测球误差的模型建立与补偿等进行研究。采用微纳米CMM搭配三维谐振测头实现对非球面透镜的面形检测,为解决检测过程中光轴方向与顶点位置难以准确确定的问题,采用LM算法对光轴方向与顶点位置进行校正;其次,针对接触式检测中的测球球径的影响问题,建立误差修正模型以补偿检测过程中的测球误差。并通过实际检测公称面形误差δ_(RMS)为250 nm的非球面透镜面形来验证所提方法的有效性。实验结果表明:经过光轴方向与顶点校正并补偿测球误差后,非球面透镜面形误差3次重复测量的结果分别为186 nm、184 nm、178 nm,重复性和一致性较好。克服了传统接触式测量方法中光轴方向与顶点难以确定和测球误差影响的问题,有效提高了非球面透镜面形测量的精度。
A contact-based measurement system is established using a coordinate measuring machine(CMM).The optimizing of the optical axis and vertex of the aspheric surface,as well as the modeling and compensation of probe error are investigated in this study.A micro-nano coordinate measuring machine coupled with a three-dimensional resonant probe is employed in this system to achieve form measurement of aspheric lens surface.A Levenberg-Marquardt(LM)algorithm is applied to address the difficulty in accurately determining the optical axis and vertex during the measurement process.To compensate for probe sphere diameter effects in contact-based measurements,an error compensation model is developed.The effectiveness of the proposed method is demonstrated by measuring the surface of an aspheric lens with a nominal RMS error of 250 nm.Experimental results show that the surface form error of the aspheric lens for three repeated measurements are 186 nm,184 nm,and 178 nm,respectively,after optimizing the optical axis and vertex and compensating for the probe error,demonstrating good repeatability and consistency.The challenges of determining the optical axis and vertex,as well as the impact of probe sphere error in traditional contact-based measurement are overcome,and the accuracy of aspheric lens surface form measurement is significantly enhanced.
作者
王广谱
黄强先
刘慧洁
程荣俊
张祖杨
李红莉
张连生
WANG Guangpu;HUANG Qiangxian;LIU Huijie;CHENG Rongjun;ZHANG Zuyang;LI Hongli;ZHANG Liansheng(Anhui Province Key Laboratory of Measurement Theory and Precision Instruments,School of Instrument Science and Opto-Electronic Engineering,Hefei University of Technology,Hefei,Anhui 230009,China)
出处
《计量学报》
北大核心
2025年第9期1279-1285,共7页
Acta Metrologica Sinica
基金
国家重点研发计划(2019YFB2004901)
国家自然科学基金(52305575)
安徽省自然科学基金(2208085ME137)
中央高校基本科研业务费(JZ2024HGTB0196)。
