摘要
现有台阶仪校准方法为先用微纳米台阶高度标准样板测量示值误差,再用计量型扫描探针显微镜校准微纳米台阶高度标准样板。这一溯源链有标准样板和扫描探针显微镜2个环节,校准过程较为复杂。针对这一问题,研究了一种可直接溯源的台阶仪校准方法。校准平台通过压电陶瓷产生位移,带动台阶仪探针的运动,并通过内嵌激光干涉仪的方法实时测量位移量,达到将台阶仪探针位移结果直接溯源到激光波长的目的,解决现有校准方法复杂的问题。校准范围为0~13μm,通过实验,可以得到台阶仪的重复性为1.48 nm,示值误差为2.78 nm,线性度为0.067%,验证了该校准平台的准确性,并对校准平台的不确定度进行了分析,其标准不确定度为0.97 nm。
The existing calibration method of the step profiler is to use the micro and nano step height standard sample plate to measure the display value error,and then use the metrological scanning probe microscope to calibrate the micro and nano step height standard sample plate.This traceability chain has two links,the standard plate and the scanning probe microscope,and the calibration process is complicated.To address this problem,a directly traceable calibration method for step profiler is investigated.The calibration platform generates displacement through piezoelectric ceramics,drives the movement of the step profiler probe,and measures the displacement in real time through the embedded laser interferometer,so as to achieve the purpose of directly tracing the displacement of the step profiler probe to the laser wavelength,and to solve the complexity of the existing calibration method.The range of calibration is 0~13μm.Through the calibration experiment,the repeatability of the step profiler can be obtained as 1.48 nm,the indication error as 2.78 nm,and the linearity as 0.067%,which verifies the accuracy of the calibration platform and analyzes the uncertainty of the calibration platform,which has a standard uncertainty of 0.97 nm.
作者
赵华庆
李加福
罗明哲
杜华
胡佳成
ZHAO Huaqing;LI Jiafu;LUO Mingzhe;DU Hua;HU Jiacheng(College of Metrology Measurement and Instrument,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China)
出处
《计量学报》
北大核心
2025年第9期1265-1271,共7页
Acta Metrologica Sinica
基金
国家自然科学基金(52205579)
国家市场监督管理总局质量技术基础能力建设(ANL2207)
中国计量科学研究院基本科研业务费(AKYZZ2205)。
关键词
几何量计量
台阶仪
校准方法
可直接溯源
压电陶瓷
激光干涉仪
geometric measurement
step profiler
calibration method
directly traceable
piezoelectric ceramic
laser interferometer
