摘要
【目的】对于1060 nm波段高功率激光器,边发射半导体激光器(LD)相比常用的固体激光器有着效率高、成本低、可靠性高和体积小等优点,但其输出光的远场不对称且光束发散角较大。文章的研究目的是在1060 nm波段基于边发射LD远场理论模型对激光器的波导结构进行优化设计,以改善其远场光斑对称性并降低发散角,实现其近准直出射。【方法】在研究方法上,文章首先根据3层平板波导理论分析了边发射LD的远场发散角与其近场光斑的关系,然后利用Lumerical有限时域差分(FDTD)仿真软件仿真设计边发射LD的波导结构及其近场光斑,尤其是对特殊微结构的设计,从而改善远场特性。【结果】文章利用Lumerical FDTD软件仿真设计了一种带有倾斜侧壁槽的微结构LD。LD工作波长为1060 nm,结构具有薄渐变折射率层、单量子阱(SQW)有源层以及非对称宽波导层,近出射端的脊波导处均匀分布了特殊结构的倾斜侧壁开槽。仿真结果显示,该设计的脊波导LD获得了2.7°的垂直远场发散角;而且达到了近准直水平出射,发射角度低至约1°。【结论】文章的工作从模拟仿真的角度验证了通过开槽激光器槽侧壁倾斜角度进行光束控制的可行性。通过设计边发射LD垂直波导结构以及槽结构参数,实现了边发射LD的低远场发散角以及近准直出射。
【Objective】For high-power lasers operating at the 1,060 nm band,edge-emitting semiconductor Laser Diode(LD)offer higher efficiency,lower cost,greater reliability,and smaller size compared with conventional solid-state lasers.However,their output exhibits an asymmetric far-field profile and a relatively large beam divergence angle.The objective of this study is to optimize the waveguide structure of edge-emitting LDs at 1060 nm using a far-field theoretical model,aiming to improve the far-field beam symmetry,reduce the divergence angle,and achieve quasi-collimated emission.【Methods】In terms of research methods,this article first analyzes the relationship between the far-field divergence angle of edge-emitting LD and its near-field spots based on the theory of three-layer planar waveguides.Then using Lumerical’s Finite-Difference Time-Domain(FDTD)simulation software,the waveguide structure of an edge-emitting LD and its near-field intensity profile are designed,with particular emphasis on specialized microstructures,to improve the far-field characteristics.【Results】In this paper,a microstructure edge-emitting LD with inclined sidewall slots is designed by using Lumerical FDTD software.The laser operates at 1060 nm.The structure has a thin graded refractive index layer,a Single Quantum Well(SQW)active layer,and an asymmetric wide waveguide layer.The ridge waveguide near the output facet is uniformly patterned with specially designed oblique sidewall grooves.The simulation results show that the designed ridge waveguide edge-emitting LD obtains a vertical far-field divergence angle of 2.7°and emits near collimation at an angle of~1°.【Conclusion】This work demonstrates,through simulation,the feasibility of beam control by tuning the sidewall tilt angle of laser grooves.By optimizing the vertical waveguide structure of the edge-emitting LD and carefully designing the groove parameters,a low far-field divergence angle and quasi-collimated output have been achieved.
作者
欧阳越华
黄龙鑫
朱政龙
叶楠
宋英雄
潘教青
张冶金
OUYANG Yuehua;HUANG Longxin;ZHU Zhenglong;YE Nan;SONG Yingxiong;PAN Jiaoqing;ZHANG Yejin(Key Laboratory of Specialty Fiber Optics and Optical Access Networks,Shanghai University,Shanghai 200444,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100085,China)
出处
《光通信研究》
北大核心
2025年第5期49-54,共6页
Study on Optical Communications
基金
国家自然科学基金面上资助项目(61771024)
科技部重点研发资助项目(2022YFB2804502)
国家自然科学基金面上资助项目(62175143)。
关键词
垂直发散角
准直
非对称波导
倾斜侧壁槽
vertical divergence angle
collimation
asymmetric waveguide
inclined sidewall micro-slot
