摘要
声学微流控技术作为一种主动式操控流体的技术,广泛应用于生化分析与生物医学领域。基于声表面波(SAW)技术与边界层流扰动机制,设计了三种不同叉指电极结构的声表面波微流控芯片,以研究直型、对称型和线性调谐聚焦型叉指电极对薄液膜定向铺展行为的影响。首先,对直型叉指电极驱动薄液膜铺展的机理进行定性验证,并对铺展速度进行定量检测。随后,通过对叉指电极结构进行优化,实现声表面波定向驱动薄液膜铺展,拓展芯片应用环境。实验结果表明,直型与对称型叉指电极可在33.2MHz频率下驱动声表面波进行薄液膜铺展,直型叉指电极可以55.53~70.58μm/s的速度进行单向驱动,对称型叉指电极可在24s内进行双向驱动并实现3600μm的铺展宽度。线性调谐聚焦型叉指电极可在30、35、40MHz频率驱动下分别沿不同运动轨迹实现薄液膜的多方向铺展。该技术可实现定向驱动,对高效表面涂层或镀膜技术的发展具有参考意义。
As an active fluid-manipulation technique,acoustic microfluidic technology is widely applied in biochemical analysis and biomedical fields.Based on surface acoustic wave(SAW)technology and the boundary laminar flow perturbation mechanism,SAW microfluidic chips with three different interdigital electrode structures were designed to study the impacts of straight,symmetric and linearly tuned focusing interdigital electrodes on the oriented spreading behavior of the thin liquid film.Firstly,qualitative validation of the mechanism for the thin liquid film spreading driven by straight interdigital electrode was conducted,and the spreading velocity was quantitatively measured.Subsequently,the interdigital electrode structure was optimized to achieve the directional spreading of the thin liquid film driven by SAW,thereby expanding the application scenarios of the chip.Experimental results demonstrate that both straight and symmetric interdigital electrodes can actuate thin liquid film spreading via SAW at 33.2 MHz.The straight interdigital electrode can achieve unidirectional driving with a velocity of 55.53-70.58μm/s,whereas the symmetric interdigital electrode enables bidirectional driving within 24 s,achieving a spreading width of 3600μm.The linearly tuned focusing interdigital electrode is capable of achieving multi-directional spreading of thin liquid films along different trajectories at frequencies of 30,35 and 40 MHz,respectively.This technology enables directional actuation and provides reference for the development of high-efficiency surface coating or coating technologies.
作者
丁晨曦
丑修建
张亦弛
Ding Chenxi;Chou Xiujian;Zhang Yichi(Shanxi Key Laboratory of Ferroelectric Physical Micro-Nano Devices and Systems,School of Instrument and Electronics,North University of China,Taiyuan 030051,China)
出处
《微纳电子技术》
2025年第10期103-110,共8页
Micronanoelectronic Technology
基金
国家自然科学基金项目(62404210)。
关键词
微流控
声表面波(SAW)
边界层流
定向驱动
薄液膜铺展
microfluidic
surface acoustic wave(SAW)
boundary laminar flow
directional actuation
thin liquid film spreading
