摘要
1.Introduction.In recent decades,the pursuit of miniaturization has been crucial in nanofabrication,fostering innovation,and enabling novel applications in chip manufacturing,nanophotonics,and quantum devices[1,2].Advancements in nanofabrication technology are driven by the demand for higher component density and performance,necessitating precise material processing in atmospheric environments.
基金
supported by the National Natural Science Foun-dation of China(51975017 and 52405448)
the Human Resource Training Project(HRTP-[2022]-53)of Innovation Laboratory for Sciences and Technologies of Energy Materials of Fujian Province(IKKEM)
the support by the China Postdoctoral Science Foundation(2024M750149 and GZC20240087).
