摘要
抗反射微结构能够有效提升材料表面对特定波段入射电磁波的吸收耦合,被广泛应用在航空航天、红外传感等领域。现有研究表明,利用飞秒激光可在平面上加工抗反射微结构,然而目前尚未见曲面构件抗反射微纳结构飞秒激光加工相关研究报道。搭建了3D飞秒激光加工平台,开展了2D激光与3D激光加工圆棒和倾斜平片的对比实验。实验结果表明,3D激光加工圆棒表面制备的微结构均匀规整,平均深度为45.313μm,平均周期为30.250μm,而2D激光加工圆棒表面制备的微结构存在搭接现象且深浅不一,微结构平均深度仅有14.588μm,平均周期为32.366μm。这是因为2D激光加工时直接投影导致的图形失真,且聚焦深度(910.67μm)远小于曲面高度差(8.48 mm),3D激光加工利用动态聚焦实现光斑曲面聚焦,采用等弧长投影的方法有效避免图形失真。采用3D激光加工倾斜平片表面制备的微结构在可见光波段各角度的镜面反射率均小于0.1%,而2D激光加工倾斜平片表面制备的微结构在可见光波段各角度的镜面反射率均超过4%,抗反射性能不佳。
Anti-reflective microstructures can effectively enhance the absorption coupling of the material surface to incident light in specific wavelength bands,which are widely used in aerospace,infrared sensing and other fields.Existing studies have shown that anti-reflective microstructures can be processed on planar surfaces using femtosecond lasers,but there are no reports on femtosecond laser processing of anti-reflective micro/nano-structures on curved surfaces.In this paper,a 3D femtosecond laser processing platform was constructed,and comparative experiments between 2D laser and 3D laser processing of round rods and inclined flat plates were carried out.The experimental results showed that the microstructures prepared on the surface of the 3D laser-processed round bar are uniform and regular,with an average depth of 45.313μm and an average period of 30.250μm,whereas those prepared using 2D laser processing exhibited overlapping phenomena and varying depths,with an average depth of only 14.588μm and an average period of 32.366μm.This is attributed to the graphic distortion caused by direct projection in 2D laser processing,combined with its depth of focus(910.67μm)being much smaller than the surface height variation(8.48 mm).In contrast,3D laser processing utilizes dynamic focusing to achieve spot surface focusing and employs an equal-arc-length projection method to effectively avoid graphic distortion.Microstructures fabricated on the inclined plate via 3D laser processing exhibited mirror reflectance below 0.1%across all angles within the visible spectrum.In contrast,those fabricated via 2D laser processing showed reflectance exceeding 4%,indicating poor anti-reflective performance.
作者
孙权权
龙归
沈丽峰
周思涛
朱雷
兰洁
段俊宇
邓波
许剑锋
肖峻峰
Sun Quanquan;Long Gui;Shen Lifeng;Zhou Sitao;Zhu Lei;Lan Jie;Duan Junyu;Deng Bo;Xu Jianfeng;Xiao Junfeng(Shanghai Aerospace Control Technology Institute,Shanghai 201109,China;State Key Laboratory of Digital Manufacturing Equipment and Technology,School of Mechanical Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,Hubei,China;China Shipbuilding Industry Corporation No.722 Research Institute,Wuhan 430079,Hubei,China)
出处
《应用激光》
北大核心
2025年第7期108-119,共12页
Applied Laser
基金
自然科学基金(52225506)
中央高校基础科研基金(2020kfyXJJS085)。
关键词
抗反射微结构
飞秒激光
曲面构件
3D激光加工
anti-reflective microstructure
femtosecond laser
curved surface
3D laser processing
