摘要
六氟化硫(SF_(6))是一种广泛应用于电力设备中的绝缘和灭弧介质气体。在SF_(6)设备运行期间,通过监测和检测设备内部的气体,能够及早发现设备的故障和异常。现有的检测技术存在气体选择性差、响应时间过长、检测步骤繁琐等缺点。为解决这些问题,设计了一种电离式气体传感器,采用微机电系统(MEMS)工艺制备,并使用柔性材料制造了微米柱结构。通过仿真分析了两种激励方式下传感器工作时的电子分布和动态变化规律;通过对比实验研究了不同激励方式下传感器对体积分数为0~500×10^(-6)的SO_(2)、H_(2)S和0~1000×10^(-6)的CO的响应特性。实验结果表明,脉冲激励下,传感器的性能得到显著提升。该柔性材料电离式传感器体积小、工作电压低,有较高的灵敏度,重复性误差低至2.3%,为检测SF_(6)设备中的特征分解气体提供了一种新的方法,具有一定的实际应用价值。
Sulfur hexafluoride(SF_(6))is an insulating and arc extinguishing medium gas widely used in power equipment.During the operation of the SF_(6)equipment,faults and abnormalities can be detected at an early stage by monitoring and detecting the gas inside the equipment.The existing detection technology has the disadvantages of poor gas selectivity,long response time,and cumbersome detection steps.To solve these problems,an ionization gas sensor was designed,prepared by micro-electromechanical system(MEMS)process,and incorporated with a micro-column structure made of flexible materials.The electronic distribution and dynamic variation rule of the sensor under the two excitation modes were analyzed by simulation.The response characteristics of the sensors to SO_(2),H_(2)S with volume fractions of 0-500×10^(-6)and CO of 0-1000×10^(-6)under different excitation modes were studied by comparative experiments.The experimental results show that the performance of the sensor is significantly improved under pulse excitation.The flexible material ionization sensor developed in this paper has small size,low working voltage,high sensitivity,and a low repeatability of 2.3%,which provides a new method for detecting characteristic decomposition gases in SF_(6)equipment and has a certain practical application value.
作者
赵亮
田兵
吕前程
骆柏锋
贾雪菲
朱程鹏
张勇
Zhao Liang;Tian Bing;LüQiancheng;Luo Baifeng;Jia Xuefei;Zhu Chengpeng;Zhang Yong(China Southern Power Grid Sensing Technology(Guangdong)Company Limited,Guangzhou 510000,China;China Southern Power Grid Digital Research Institute,Guangzhou 510000,China;State Key Laboratory of Electrical Insulation and Power Equipment,Xi’an 710049,China;School of Electrical Engineering,Xi'an Jiaotong University,Xi’an 710049,China;School of Instrument Science and Technology,Xi'an Jiaotong University,Xi’an 710049,China)
出处
《微纳电子技术》
2025年第9期68-80,共13页
Micronanoelectronic Technology
基金
国家重点研发计划(2022YFB3206803)
南方电网数字电网研究院股份有限公司科技项目(210000KC23010005)。
