摘要
用于血压监测的微型微机电系统(MEMS)压力传感器依赖可靠的封装来实现更准确的实时监测。Parylene涂层凭借其生物相容性和低渗透性,成为封装的理想选择之一,然而较差的附着力限制了其应用。提出了一种增强附着力的Parylene复合涂层封装方案,提升了传感器的精度和热稳定性。通过比较不同Parylene涂层的附着力和薄膜应力,以及评估在常温(25℃)和人体温度范围(34~42℃)下不同涂层封装的传感器的性能,得到性能表现优异的涂层方案,并进行了相应机理解释。实验结果表明,不同Parylene涂层封装的器件热零点漂移性能均有显著提高;其中,经Parylene C1F5+A174复合涂层封装的器件精度提升明显,并在人体温度范围内表现出较好的灵敏度和良好的热稳定性,可为血压监测压力传感器提供更好的封装保护。
Reliable packaging is critical for miniature micro-electromechanical system(MEMS)pressure sensors for blood pressure monitoring to achieve more accurate real-time monitoring.Parylene coatings are promising candidates due to their biocompatibility and low permeability,yet their poor adhesion restricts practical applications.A Parylene composite coating encapsulation scheme with enhanced adhesion strength to improve sensor accuracy and thermal stability was proposed.By comparing the adhesion strength and film stress of different Parylene coatings,as well as evaluating sensor performance encapsulated with these coatings at room temperature(25℃)and within the human body temperature range(34-42℃),optimal coating solutions were identified and their underlying mechanisms were analyzed.Experimental results demonstrate significant improvements in thermal zero drift performance for all encapsulated devices.Specifically,devices encapsulated with the Parylene C1F5+A174 composite coating exhibit superior precision enhancement and maintain high sensitivity and good thermal stability across the human body temperature range,providing robust packaging protection for blood pressure monitoring sensors.
作者
张鹏坤
赵永梅
尹兴业
赵晓阳
董昭润
王晓东
Zhang Pengkun;Zhao Yongmei;Yin Xingye;Zhao Xiaoyang;Dong Zhaorun;Wang Xiaodong(Engineering Research Center for Semiconductor Integrated Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China;School of Integrated Circuits,University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《微纳电子技术》
2025年第9期17-28,共12页
Micronanoelectronic Technology
基金
中国科学院科学仪器研发项目(PTYQ2024BJ0003)
中国科学院战略性先导科技专项(XDB43020500)。
