摘要
呼吸系统疾病可通过多种呼吸参数进行早期监测和预警,而作为呼吸状态监测的核心元件,湿度传感器存在高成本、刚性基底及低便携性等固有缺陷。本文提出了一种基于BaTiO_(3)和激光诱导石墨烯(LIG)叉指电极的新型可穿戴湿度传感器,通过激光直写技术实现了LIG叉指电极的“一步法”高效制备。结果表明:LIG呈独特的蜂窝状三维多孔结构,这种结构有效增大了湿敏层的比表面积,为水分子提供了更多吸附位点。在相对湿度范围为11%~97%时,BaTiO_(3)/LIG湿度传感器展现出优异的电容响应/恢复性能、循环稳定性及机械性能。将该器件应用于人体呼吸状态监测中,可实时感知记录呼吸信号,通过分析电容曲线的峰形、强度、半峰宽度、波动情况及呼吸周期时间可识别不同呼吸器官、呼吸频率及呼吸距离,这对智能医疗诊断具有重要价值。
Respiratory diseases can be monitored early and warned through multiple respiratory parameters.As the core component of respiratory state monitoring,humidity sensors have inherent defects such as high cost,rigid substrate and low portability.This paper proposed a new wearable humidity sensor based on BaTiO_(3) and laser induced graphene(LIG)interdigital electrodes.The efficient“one-step”process of LIG interdigital electrodes was achieved through laser direct writing technology.The results show that LIG presents a unique honeycomb-like three-dimensional porous structure.This structure effectively increases the specific surface area of the humidity-sensitive layer and provides more adsorption sites for water molecules.The BaTiO3/LIG sensor has excellent capacitive response/recovery performance,cyclic stability,and mechanical properties in the relative humidity range of 11%~97%.When applied to human respiratory monitoring,the device can sense and record respiratory signals in real time.By analyzing the peak shape,intensity,half-peak width,fluctuation and respiratory cycle time of the capacitance curve,different respiratory organs,respiratory frequencies and respiratory distances can be identified,which is of great value for intelligent medical diagnosis.
作者
朱聪聪
黄世谋
王旭杰
刘胜胜
崔昇
ZHU Congcong;HUANG Shimou;WANG Xujie;LIU Shengsheng;CUI Sheng(School of Energy and Materials Engineering,Taiyuan University of Science and Technology,Taiyuan 030024,China;Sanmenxia Polytechnic,Sanmenxia 472000,China;School of Materials Science and Engineering,Taiyuan University of Science and Technology,Taiyuan 030024,China)
出处
《硅酸盐通报》
北大核心
2025年第8期3088-3095,共8页
Bulletin of the Chinese Ceramic Society
基金
山西省基础研究计划(202403021222194)
山西省高等学校科技创新计划(2024L244,2022L327)
太原科技大学科研启动基金(20232123)。
关键词
湿度传感器
钛酸钡
石墨烯
呼吸监测
柔性
humidity sensor
BaTiO_(3)
graphene
respiratiory monitoring
flexibile
