摘要
介绍了一种采用0.18μm CMOS工艺制作的通用型多参量传感器信号处理电路,可用于R/C/V型传感器信号处理。针对R/C/V型传感器基线差异问题,基于直流伺服环路和电荷守恒原理,设计开关电容式轨到轨电压型基线补偿和辅助锁定电路,自动消除R/C/V型传感器静态基线差异,以拓展传感器检测范围,避免信号处理电路饱和失真。测试结果表明,R/C/V型传感器检测范围分别为0Ω~5 kΩ、0 pF~200 pF、0 V~1.8 V。在20~80℃温度范围内,电路系统增益线性度R^(2)大于0.9999,增益温漂小于3‰/℃,芯片测温误差最大值为0.35℃。
A universal multi-parameter sensor signal processing circuit was developed using a 0.18μm CMOS IC process for R/C/V type sensor signal processing.To solve the problem of baseline differences among these R/C/V type sensors,a switched capacitor rail-to-rail voltage-type baseline compensation and auxiliary locking circuit was designed.This circuit operates based on DC servo loop and the charge conservation principle.The baseline compensation circuit automatically eliminates the static baseline differences among R/C/V type sensors to expand the detection range of sensors and prevent signal processing saturation distortion.The test results show that the detection ranges of R/C/V type sensors are 0Ω–5 kΩ,0–200 pF,0–1.8 V,respectively.Within the temperature range of 20–80℃,the gain linearity R^(2) of the circuit system is greater than 0.9999,the temperature drift of the gain is less than 3‰/℃,and the maximum temperature measurement error of the chip is 0.35℃.
作者
侯影
李政
刘铭扬
刘伟
李振明
刘昱
HOU Ying;LI Zheng;LIU Mingyang;LIU Wei;LI Zhenming;LIU Yu(Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,P.R.China;Energy Storage and Electrotechnics Department,China Electric Power Research Institute Limited Company,Beijing 100192,P.R.China;University of Chinese Academy of Sciences,Beijing 101408,P.R.China)
出处
《微电子学》
北大核心
2025年第2期197-204,共8页
Microelectronics
基金
国家电网有限公司科技项目(5700-202155453A-0-0-00)。
关键词
基线补偿电路
多参量传感器
检测范围
线性度
baseline compensation circuit
multi-parameter sensor
detection range
linearity
