摘要
本文采用熔融淬冷法制备了Ge_(20)Se_(60)Te_(20)和Ge_(20)Se_(20)Te_(60)硫系玻璃,并使用电子束蒸发法制备了Ge_(20)Se_(60)Te_(20)和Ge_(20)Se_(20)Te_(60)远红外非晶硫系薄膜.结合XRD、AFM、拉曼光谱、傅里叶光谱等技术,研究发现制备得到的非晶硫系薄膜能完全继承块体玻璃的结构,以及良好的远红外光学和热学性能.此外,该远红外非晶硫系薄膜具备亚波长厚度且无缺陷,以及极低的表面粗糙度、较低的光学损耗、极高的光学折射率.通过优化电子束蒸发实验参数,能高效可控制备得到~8μm厚的Ge_(20)Se_(20)Te_(60)薄膜,在8–14μm范围内,其折射率约为3.12,消光系数小于0.015,平均透过率接近70%.该薄膜的开发有利于远红外光子器件的研制,可用于如远红外高透的异质超构透镜应用.
In this study,Ge_(20)Se_(60)Te_(20) and Ge_(20)Se_(20)Te_(60) chalcogenide glasses were synthesized using the melt quenching technique,and the amorphous chalcogenide Ge-Se-Te films with the same compositions were deposited via the method of electron beam evaporation.Together with the results of XRD,AFM,Raman spectroscopy,and Fourier transform spectroscopy,it was found that the as-deposited films can fully inherit the amorphous structures from the bulk glasses,and exhibit excellent far-infrared optical and thermal properties.Moreover,we found that the amorphous films have a subwavelength-level thickness without any defects,and low surface roughness,low optical loss,as well as the high optical refractive index.By optimizing the experimental parameters of electron beam evaporation,~8μm thick Ge_(20)Se_(20)Te_(60) films can be deposited efficiently and controllably,with a high refractive index of~3.12,low extinction coefficient(<0.015),and an average optical transmittance of~70%,in the range of 8-14μm.The development of this amorphous film is beneficial in the research of far-infrared photonic devices,and can be used for applications such as farinfrared heterogeneous metalenes.
作者
范策
刘自军
顾辰杰
沈祥
徐铁峰
陈益敏
FAN Ce;LIU ZiJun;GU ChenJie;SHEN Xiang;XU TieFeng;CHEN YiMin(School of Physical Science and Technology,Ningbo University,Ningbo 315211,China;Zhejiang Provincial Key Laboratory of Optoelectronic Detection Materials and Devices,the Research Institute of Advanced Technologies,Ningbo University,Ningbo 315211,China;Ningbo Solartrum Co.Ltd.,Ningbo 315105,China)
出处
《中国科学:物理学、力学、天文学》
北大核心
2025年第8期283-290,共8页
Scientia Sinica Physica,Mechanica & Astronomica
基金
国家自然科学基金(编号:U21A2056,62374096,62075110)
浙江省自然科学基金/重大项目/创新群体项目(编号:LDT23F05012F05)资助。
关键词
非晶硫系薄膜
电子束蒸发沉积
远红外光学特性
chalcogenide amorphous films
electron beam evaporation deposition
far-infrared optical properties
