摘要
飞秒激光直写是一种高效且灵活的3维精密材料加工技术,在许多领域得到了广泛的应用;光波导是集成光子学器件中的一种基本导波结构,能够将光场限制在微小的通道内进行无衍射的传播。从飞秒激光诱导材料改性与材料烧蚀出发,对飞秒激光直写光波导的作用机理以及基于不同类型材料所制备的光波导损耗进行了总结和分析;归纳了利用飞秒激光直写技术在玻璃、晶体以及聚合物等材料上低成本、高效率地制备光波导结构的研究,并指出通过调整激光和加工参数,可实现一定波长下的波导结构调控;最后对飞秒激光加工光波导的未来做出展望,实现低损耗、高平滑度、信息保真度和3维立体化的光波导将是未来集成化微纳光学器件激光制造过程中最需要解决的关键环节。
Direct writing with femtosecond lasers is the efficient and flexible 3-D precision material processing technology,which has been widely used in many fields.The optical waveguide is one of the basic configurations in an integrated photonic device,which can restrain the light field in a small channel for the diffraction-free propagation.In this paper,with the aid of the material modification and material ablation during the femtosecond laser processing,the directly-writting mechanism and the depletion of optical waveguides for different materials was summarized and analyzed.Researches utilized femtosecond lasers to realize the direct writing technology with low cost and high efficiency on materials such as glass,crystal,and polymers,ect.were reviewed.Finally,wthe prospect was made for the waveguides processed by femtosecond lasers in this review.It seems that the most critical factor during the laser manufacturing process of integrated micro-nano optical devices might be the low loss,high smoothness,high information fidelity,and 3-D fabrication of waveguides fabrication in the near future.
作者
王佳琪
宋迪
秦曌鹏
韩聚洪
王雅兰
程佳
苏成欢
王浟
WANG Jiaqi;SONG Di;QIN Zhaopeng;HAN Juhong;WANG Yalan;CHENG Jia;SU Chenghuan;WANG You(Southwest Institute of Technical Physics,Chengdu 610041,China)
出处
《激光技术》
北大核心
2025年第4期484-494,共11页
Laser Technology
基金
国家重点研发计划资助项目(2021YFA0718803)。
关键词
激光技术
光波导
激光改性
烧蚀材料
laser technique
optical waveguide
laser modification
material ablation
