摘要
温度均匀性是真空烧结炉的核心性能指标之一,直接影响工件烧结质量。本文通过对真空烧结炉温度场的数值模拟,研究了石墨工装板厚度对炉内温度均匀性的影响。结果表明:下支撑板厚度对温度均匀性影响最大,盖板次之,而侧板影响微弱;优化后的石墨工装板参数为下板厚50 mm,盖板厚20 mm,侧板厚60 mm;相较于原始方案,优化后工件间的最大温差减小19.1℃,即减小了10.7%。本研究可供真空烧结炉的工装设计与优化参考。
The vacuum sintering furnace is a crucial apparatus for the growth of silicon carbide,where the temperature uniformity within the furnace serves as a key performance indicator,directly impacting the quality of the workpieces.In this paper,numerical simulations on the temperature field inside a vacuum sintering furnace was conducted to investigate the influence of graphite-plate thickness on temperature uniformity.The results indicate that the thickness of the lower support plate has the most significant effect on furnace temperature uniformity,followed by the cover plate,while the side plate exerts a negligible role.The optimized thicknesses of the lower,cover and side plates are 50,20 and 60 mm,respectively,the maximum temperature difference within workpieces thus decreased by 19.1℃i.e.,10.7%.This study may provide valuable insights for the design and optimization of graphite plate of vacuum sintering furnace.
作者
周明旭
李建昌
ZHOU Mingxu;LI Jianchang(Vacuum and Fluid Engineering Research Center,School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)
出处
《真空》
2025年第4期49-53,共5页
Vacuum
基金
山东省科技厅重点研发计划(重大科技创新工程)项目(2023CXGC010208)。
关键词
真空烧结炉
数值模拟
石墨工装板
温度场
vacuum sintering furnace
numerical simulation
graphite plate
temperature field
