摘要
A stacked piezoelectric micropump based on the synthetic jet principle with a size of 22×22×5 mm^(3) is designed and fabricated.Through theoretical and finite element method(FEM)analysis,the conditions for achieving a synthetic jet structure are obtained,and the gas flow properties inside the chamber are analyzed.The first-order mode and resonant frequency of the piezoelectric actuator are simulated.At a resonant frequency of 22.5 kHz,the maximum central displacement of the actuator can reach 12.3μm.In addition,the key dimensions of the micropump are optimized to improve the output flow rate.Experiments on the prototype of the micropump show that it can reach a maximum output flow rate of 618 mL/min when driven by a sine wave signal of 42 Vpp and 22.5 kHz.The power dissipation does not exceed 600 mW.
基金
funded by National Natural Science Foundation of China(Nos.U20A20172,U24A20222)
Zhejiang Province Key R&D programs(No.2023C01192)
supported by the Fundamental Research Funds for the Provincial Universities of Zhejiang(No.GK239909299001).
