摘要
为了观察不同粒径的磨粒对Si_(3)N_(4)陶瓷基板薄片研磨加工性能的影响,根据实际生产过程中产生的数据,比较定制化240#、270#和300#粒径尺寸的碳化硼磨粒和碳化硅磨粒在铸铁磨盘上快速减薄Si_(3)N_(4)陶瓷基板薄片时的研磨效率、表面粗糙度、TTV值、良品率、磨粒寿命、抗折强度和BOW值.结果表明:在保证表面粗糙度、TTV值、抗折强度等指标的数据点全在规格线以内时,300#碳化硼磨粒的研磨效率最佳,300#碳化硅磨粒的表面质量最佳.为了提升产品加工效率,可以选择300#碳化硼作为磨粒;为了保证产品有更好的质量,可以选择300#碳化硅作为磨粒.
In order to observe the effects of various abrasive grain sizes on the grinding performance of Si_(3)N_(4)ceramic substrate,based on the data by the actual production process,the grinding efficiency,surface roughness,total thickness variation(TTV),yield,grain life,flexural strength and BOW value were compared between customized boron carbide(B4C)and silicon carbide(SiC)particles of 240#,270#,and 300#grain sizes for the rapid thinning of Si_(3)N_(4)ceramic substrate on a cast iron grinding disc.The results show that 300#B4C abrasive grains can achieve the best grinding efficiency,and 300#SiC abrasive grains can achieve the best surface quality when ensuring that the data points of surface roughness,TTV value,and flexural strength are all within the specification line.Thus,in order to improve product processing efficiency,300#B4C is the best choice;in order to ensure better product quality,300#SiC can be chosen.
作者
赵海龙
曹夏
彭翔
余德平
刘进伟
ZHAO Hailong;CAO Xia;PENG Xiang;YU Deping;LIU Jinwei(Yibin Redstar Electronics Co.,Ltd,Yibin,Sichuan 644600,China;Industrial Technology Research Institute in Yibin,Sichuan University,Yibin,Sichuan 644005,China)
出处
《宜宾学院学报》
2025年第6期47-52,共6页
Journal of Yibin University
基金
宜宾市引进高层次人才项目(2023YG05)。
