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飞秒激光制备双材料微型致动器的方法研究

Femtosecond Laser Preparation of Bimaterial Micro-Actuators
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摘要 微型致动器在许多领域中有着广阔的应用场景,然而微纳米尺度致动器大多数只能由单材料制备,无法适应复杂多变的环境。针对日益增加的双材料或多材料致动器需求,基于飞秒激光分步加工的方式,提出了一种将温敏水凝胶和光刻胶耦合到同一微型器件上的方法。温敏水凝胶能够响应外部环境刺激而发生变形,光刻胶则具有良好的力学性能。两种材料复合的微型器件不仅能够实现可编程变形,还具备优异的力学性能,并可通过温度控制来执行指定任务。作为验证,成功制备了微型阀门和仿生贝壳两种双材料微型致动器,拓展了所提方法在微流控通道和微粒捕获领域中的应用范围。 Objective Femtosecond laser direct writing is a microfabrication technology that focuses a pulsed laser beam on the surface or interior of a material,causing changes in material propeties.The unique processing of femtosecondlaser directwriting technology enables the processing and preparation of arbitrarily shaped threedimensional structures.Hydrogels can be regarded as soft materials in liquid environments because of their special molecular morphology and conformational changes.In response to external environmental stimuli,they have the ability to deform and are widely used in the preparation of microactuators.Hydrogels can respond to two common stimuli:pH and temperature.However,at the micro and nano scales,the actuators prepared by these two hydrogel materials have common problems,such as poor mechanical strength and simple morphological structure.Therefore,researchers have begun to consider combining the advantages of hard and soft materials to develop a microactuator.The pH hydrogels require changes in the pH value of the liquid environment,thereby complicating their use in composite microactuators in fields such as cell harvesting and biomedicine.Therefore,to cover more scenarios,hard materials should be effectively combined with thermosensitive hydrogels.Methods In this study,a strategy for the fabrication of thermosensitive microactuators is proposed based on femtosecond laser printing,using hard photoresist and soft thermosensitive hydrogel materials,thereby combining the advantages of high mechanical strength of hard materials and stimulated deformation of soft materials.The photoresist used in the experiment is a hard material,almost unaffected by the ambient temperature after processing and molding.The other material,thermosensitive hydrogel,is a soft material that is affected by ambient temperature,shrinking in volume when the critical temperature is exceeded and returning to its original state below the critical temperature.Using the programmability and ultrahigh precision of femtosecond laser printing,the photoresist and hydrogel structures are processed stepbystep,whereby the deformation force generated by the hydrogel shrinkage causes the photoresist to deform synchronously.Therefore,the temperature can be reversed to drive the microactuators.The hydrogel required additional formulation according to materials and dosage,as follows:400 mg Nisopropylacrylamide(NIPAM)as monomer,30 mg diphenyl(2,4,6-trimethylbenzoyl)phosphine oxide(TPO)as photoinitiator,30 mg N,N′-methylenebisacrylamide(MBA)as crosslinking agent,and 450μL ethylene glycol as solvent.During preparation,several materials are mixed,heated in a water bath,and sonicated until completely dissolved,finally adding 50 mg polyvinylpyrrolidone(PVP)as a thickener.Results and Discussions We prepare a bimaterial microvalve consisting of four identical thermosensitive hydrogels and photoresist sheets,as shown in Fig 6.For ambient temperatures lower than the critical deformation temperature of the thermosensitive hydrogel,the gap in the middle of the valve is the smallest,an approximate square with a side length of 11.4μm,such that the valve is considered to be closed.By adding hot deionized water,the temperature of the surrounding solution is instantly raised,whereby the hydrogel shrinks and the photoresist sheet is bent simultaneously,and the square side length in the middle of the valve changes from 11.4μm to 21.4μm,which is regarded as the valve being open;the valve area is about 3.5 times that of the valve in the closed state.In addition,inspired by the defense and movement of shells in nature,we prepare a bionic shell actuator at micro and nano scales with a hard photoresist as the shell and a soft hydrogel as the muscle,using it to complete the capture of particles,as shown in Fig 7.In the experiment,a silica microsphere with a diameter of 20μm is successfully captured using the reproducible open and closed characteristics of the bionic shell.Both microactuators are characterized by fast response,excellent mechanical properties,and reusability.The strategy of composite processing of thermosensitive hydrogels and photoresists provides a new idea for the preparation of actuators for microfluidics and particle capture.Conclusions In this study,based on a femtosecond laser highprecision threedimensional processing system,a strategy is proposed for the development of microactuators combining photoresist and thermosensitive hydrogels with two different properties.The system is successfully applied to microvalves and particulate capture devices.The prepared microstructured devices are in the micron range and display good mechanical properties,fast response speed,and high programmability.The opening and closing of temperaturecontrolled microvalves can increase the channel area by up to 3.5 times,which can be used for fluid flow control or particle screening.In the experiment,the bionic shell device uses hard photoresist as the shell and soft hydrogel as the muscle,to imitate the opening and closing of natural shells,thereby successfully capturing silica microspheres with a diameter of 20μm.The bimaterial microactuator fabrication method proposed in this study can be widely used in microfluidic systems,particle capture,and other fields,thereby providing new ideas for future applications.However,owing to the influence of the deformation mechanism of hydrogels,the microactuators proposed in this paper can only work in a liquid environment.Therefore,in the future,we can continue to explore alternative materials for thermosensitive hydrogels,such as liquid crystal elastomers and air hydrogels,to expand the application of bimaterial microactuators.
作者 梁凯文 潘登 范胜颖 任中国 吴东 Liang Kaiwen;Pan Deng;Fan Shengying;Ren Zhongguo;Wu Dong(School of Engineering Science,University of Science and Technology of China,Hefei 230026,Anhui,China;Information Materials and Intelligent Sensing Laboratory of Anhui Province,Anhui University,Hefei 230601,Anhui,China;Laser Institute,Shandong Academy of Sciences,Jinan 250100,Shandong,China)
出处 《中国激光》 北大核心 2025年第8期251-259,共9页 Chinese Journal of Lasers
基金 国家自然科学基金(62205236) 山东省自然基金(ZR2024QF113)。
关键词 飞秒激光 温敏水凝胶 复合加工 微型致动器 微阀 微粒捕获 femtosecond laser thermosensitive hydrogel composite processing microactuator microvalve particulate capture
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