摘要
提出一种基于近场静电纺丝自对准堆叠,并辅以选择性电镀铜的制造方法,实现高深宽比嵌入式柔性透明电极结构的制备。研究了峰值脉冲电压、脉冲电压频率和基底移动速度对纺丝自对准能力的影响规律。实验结果表明,当峰值脉冲电压为1600 V、脉冲电压频率为1200 Hz、基底移动速度为20 mm/s时,基底纤维线宽相对较小,纤维自对准效果最佳。最后通过参数验证,使用此工艺参数成功制备出14 mm×14 mm网格的嵌入式柔性透明电极,线宽小于12μm,间距1 mm,堆叠层数40层,深宽比高达3.33,方阻约为0.146Ω/□,可见光波段透光率(波长550 nm处)为85.9%,品质因数(FoM)达到16352,为高深宽比嵌入式柔性透明电极制造提供了新的途径。
A novel fabrication method combining near-field electrospinning self-aligned stacking with selective copper electroplating was introduced,enabling the creation of flexible transparent electrodes with high aspect ratio embedded structures.The influence law of peak pulse voltage,pulse voltage frequency and substrate moving speed on the self-alignment capability during spinning was investigated.Experimental results indicate that optimal fiber alignment is achieved when the peak pulse voltage is 1600 V,the pulse voltage frequency is 1200 Hz,and the substrate moving speed is 20 mm/s,resulting in minimal fiber line width on the substrate.Through parameter validation,a 14 mm×14 mm mesh embedded flexible transparent electrode was successfully fabricated using these optimized process parameters.The electrode features a line width of less than 12μm,a spacing of 1 mm,40 stacked layers,an aspect ratio of up to 3.33,a sheet resistance of about 0.146Ω/□,and a light transmittance of 85.9%in the visible light band(550 nm wavelength).The figure of merit(FoM)reaches 16352,offering a promising new approach for manufacturing embedded flexible transparent electrodes with high aspect ratio.
作者
杨翊
潘艳桥
汪方杰
王熙龙
孙月
张峰
Yang Yi;Pan Yanqiao;Wang Fangjie;Wang Xilong;Sun Yue;Zhang Feng(Hubei Provincial Key Laboratory of Mechanical Transmission and Manufacturing Engineering,School of Mechanical Engineering,Wuhan University of Science and Technology,Wuhan 430081,China;Precision Manufacturing Research Institute,School of Mechanical Engineering,Wuhan University of Science and Technology,Wuhan 430081,China;Key Laboratory of Metallurgical Equipment and Control of Ministry of Education,School of Mechanical Engineering,Wuhan University of Science and Technology,Wuhan 430081,China)
出处
《微纳电子技术》
2025年第6期93-100,共8页
Micronanoelectronic Technology
基金
国家自然科学基金(12102311)
智能制造装备与技术全国重点实验室开放课题基金(IMETKF2023010)
湖北省自然科学基金面上项目(2025AFB507)。
关键词
嵌入式柔性透明电极
近场静电纺丝
自对准堆叠
高深宽比
工艺优化
embedded flexible transparent electrode
near-field electrospinning
self-aligned stacking
high aspect ratio
process optimization
