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硬脆材料激光高精切削成型关键技术(特邀) 被引量:2

Key Technology of Laser High⁃Precision Cutting and Shaping of Hard and Brittle Materials(Invited)
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摘要 硬脆材料具有出色的机械、光学和化学性能,对硬脆材料高效和高几何精度的加工需求推动着现代加工技术的不断更新迭代。激光切削具有高自由度、高精度和非接触式的加工优势,在硬脆材料及其复杂结构的高精切削成型中发挥着越来越重要的作用。综述了硬脆材料激光高精切削成型关键技术的研究和进展,以激光与物质相互作用机理为基础,重点介绍了应用于硬脆材料大厚度/大长径比的激光无损伤切削技术、硬脆材料多维构件的激光高精切削成型技术及硬脆材料的激光复合切削成型技术,并对该领域发展所面临的挑战和前景进行了探讨。 Significance Hard and brittle materials possess excellent mechanical,optical,and chemical properties.However,the demand for efficient and high-precision processing drives continuous innovation in modern processing technologies.Laser processing plays an increasingly important role in high-precision cutting and shaping of these materials due to its high flexibility,precision,and non-contact nature.In this study,we overview the current research and progress on the key technologies of laser high-precision cutting and shaping of hard and brittle materials,particularly focusing on applications involving large thickness/large length ratio,multi-dimensional components,and composite cutting and forming.In addition,we discuss the challenges and prospects of this technology,aiming to provide theoretical guidance and a technical foundation for the advancement of related industries.Progress We first discuss the fundamental interaction between lasers and brittle materials.We elaborate on the laser processing of large thickness brittle materials,high-precision cutting of multi-dimensional components,and composite cutting and forming technologies.Besides,we analyze the technical principles,advantages,and application examples of these technologies,which lays a solid foundation for innovations in laser cutting of hard and brittle materials.For the laser cutting of materials with large thickness or a high length-to-diameter ratio,methods such as non-destructive close piercing,multi-focal distribution spherical aberration correction,Bessel beam modulation,and laser filamentation have been successfully applied to address issues like heat accumulation,beam aberration,and energy loss.These methods enable high-precision cutting of thick,hard,and brittle materials,including the machining of complex structures that are challenging for traditional methods.In multi-dimensional structure cutting,the application of computer numerical control(CNC)technology enables precise multi-dimensional laser cutting and structuring.The closed-loop feedback system,with high-precision positioning and trajectory control,plays a crucial role in achieving accurate multi-dimensional cutting and forming.Laser composite cutting and forming technologies significantly improve cutting accuracy and quality by integrating laser techniques with other processing methods.Coupling laser processing with mechanical methods,liquid assistance,chemical etching,and optical far-field-induced near-field breakdown(O-FIB)effectively reduces thermal damage,microcracks,and recast layers.These composite methods not only increase processing efficiency but also expand the range of applications for hard and brittle materials,enabling more intricate multi-dimensional structures.The progress of laser high-precision cutting methods enhances the machining accuracy and efficiency of hard and brittle materials,broadening their application prospects in fields such as precision instruments,artificial intelligence,and bioengineering.With continuous advancements,laser cutting and shaping technologies will play a more significant role in future micro/nanomanufacturing.Conclusions and Prospects Laser cutting technology is widely used in industrial manufacturing due to its ability to enhance machining accuracy and efficiency while minimizing thermal effects.We systematically review recent advances in laser high-precision cutting and shaping of hard and brittle materials.By integrating cutting-edge techniques such as chemical etching,multiphoton absorption,and liquid-assisted methods,laser cutting effectively mitigates issues like thermal stress and microcracking.Particularly for complex structures and large-thickness materials,innovative approaches such as Bessel beams,multi-focus technology,and far-field-induced near-field enhancement further improve cutting performance and precision.As new materials,including composites and functional materials,emerge,laser cutting technology continues to expand in its applications.Further exploration of the interaction between lasers and various materials,as well as optimization of processes tailored to new material requirements,is necessary.The deep integration of laser technology with intelligent manufacturing and automation will provide a powerful momentum for the future development of high-end equipment.
作者 季凌飞 张森 林真源 范金帅 张文泷 姚天然 杨建业 Ji Lingfei;Zhang Sen;Lin Zhenyuan;Fan Jinshuai;Zhang Wenlong;Yao Tianran;Yang Jianye(Institute of Laser Engineering,School of Physics and Optoelectronic Engineering,Beijing University of Technology,Beijing 100124,China;Key Laboratory of Trans-scale Laser Manufacturing Technology of Ministry of Education,Beijing University of Technology,Beijing 100124,China;Beijing Engineering Research Center of Laser Applied Technology,Beijing 100124,China)
出处 《光学学报》 北大核心 2025年第2期1-12,共12页 Acta Optica Sinica
基金 国家自然科学基金(51975013,51275011) 北京市教委重点科研项目(KZ202110005012) 北京市自然科学基金-海淀联合基金重点项目(L222011)。
关键词 激光切削 硬脆材料 高精加工 laser cutting hard and brittle materials high precision machining
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