摘要
低温等离子体技术是一种新兴杀菌技术,其消杀效果依赖于浓度,故浓度的监测是一项十分重要的工作.设计了一款高精度、宽量程低温等离子浓度检测仪,以微弱电流检测为核心并通过自动量程切换、优化电路设计降低噪声.针对等离子浓度-电压存在非线性的问题,采用PSO-XGBoost模型进行拟合,进一步提高测量精度.测试结果表明,该仪器实现了最大量程10亿个(指离子数)/cm^(3),且分辨率可达1000个/cm^(3),测试误差小于3.1%.该研究提供了一种高效的等离子浓度检测手段.
Low temperature plasma was usually regarded as an emerging sterilization technology,whose sterilizing effect depended on its concentration.The concentration monitoring was then considered as a particularly important work.Based on weak current detection,a high-precision,wide-range concentration measuring instrument was designed,which optimized design of circuit and can automatically switch the range.Moreover,in order to deal with the problem of the nonlinearity between plasma concentration-voltage,an algorithm based on the PSO-XGBoost was proposed to improve measurement accuracy.The experimental results showed that the instrument had the range of 1 billion/cm^(3)and the resolution of 1000/cm^(3),with the error of less than 3.1%.The design could provide an efficient method for detecting plasma concentration.
作者
沈建国
施华晔
郑海锋
杨鸿健
蒋敏兰
李盛
SHEN Jianguo;SHI Huaye;ZHENG Haifeng;YANG Hongjian;JIANGMinlan;LI Sheng(College of Physics and Electronic Information Engineering,Zhejiang Normal University,Jinhua 321004,China;Zhejiang Institute of Photoelectronics,Jinhua 321004,China)
出处
《浙江师范大学学报(自然科学版)》
2025年第2期163-169,共7页
Journal of Zhejiang Normal University:Natural Sciences
基金
浙江省科技计划资助项目(2022C01030)
国家级大学生创新训练计划项目(202210345020,202210345022)。
