摘要
Atomic layer deposition(ALD)has been an important surface processing technique of materials of important applications.In the present investigation aluminum oxide thin films are generated using ALD technique(ALD-Al_(2)O_(3)).The ALD-Al_(2)O_(3)films are formed over SS304 substrates with thicknesses of 20,75 and 100 nm and the corrosion investigations are carried out using polarization and impedance measurements.The neutron reflectivity measurements are carried out to measure the thickness and surface roughness of the film.The corrosion property of SS304 observed to be reduced on ALD deposition which has been evident from the polarization measurements and supported by the electrochemical impedance measurements.The ennoblement in the corrosion potential has been observed due to the ALD-Al_(2)O_(3)film formation over the SS304 surface.The polarization resistance remained high even at high applied anodic potential of 0.7 V,the protection remained stable even at an elevated temperature of 60οC.The investigation supports the primary objective of the important role of the protection of material through thin ALD-Al_(2)O_(3)protective films.
