摘要
集成光子器件技术的最新进展充分满足了市场对于紧凑型、高效光电系统的需求,同时也有力地促进了光学超表面技术的发展。其中,垂直腔面发射激光器(VCSEL)与超表面的集成,可生成具有特定波前的矢量光束,极大地增强光电系统的功能性和灵活性。本文设计了基于Si_(3)N_(4)纳米天线阵列超表面的850 nm VCSEL,通过对纳米天线结构参数的调控,实现了超过2π的相位覆盖,并采用1阶和2阶涡旋相位板,成功产生了不同阶数的涡旋光束。这一成果为光学超表面调控VCSEL光场技术提供了新思路。
The latest development of integrated photonic device technology fully meets the market demand for compact and efficient optoelectronic systems,and also effectively promotes the development of optical metasurface technology.Among them,the integration of vertical cavity surface emitting laser(VCSEL)and metasurface can generate vector beams with specific wavefronts,which greatly enhances the functionality and flexibility of optoelectronic systems.In this paper,an 850 nm VCSEL based on Si_(3)N_(4) nanoantenna array metasurface is designed.By adjusting the structural parameters of the nanoantenna,more than 2π phase coverage is achieved,and vortex beams of different orders are successfully generated by using first-order and second-order vortex phase plates.This result provides a new idea for the optical metasurface control of VCSEL light field technology.
作者
牛昊
王永丽
姜增璇
李川川
魏志鹏
宋国峰
NIU Hao;WANG Yongli;JIANG Zengxuan;LI Chuanchuan;WEI Zhipeng;SONG Guofeng(State Key Laboratory of High Power Semiconductor Laser,Changchun University of Science and Technology,Changchun 130022,China;Zhongshan Institute of Changchun University of Science and Technology,Zhongshan 528437,China;Laboratory of Nano-Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China)
出处
《发光学报》
北大核心
2025年第2期326-333,共8页
Chinese Journal of Luminescence
基金
中华人民共和国科学技术部(2023YFB4604400)
国家自然科学基金(12074045,62027820,61904017)
吉林省自然科学基金(20230101352JC)
国家“111”计划项目(D17017)。
关键词
超表面
涡旋光束
垂直腔面发射激光器
集成光子器件
metasurface
vortex beam
vertical cavity surface emitting laser
integrated photonic devices
