摘要
针对MPCVD装置冷却水温度控制中存在的调节时间长、稳定性能差的弊端,提出一种将改进后的混沌蛇鹫优化算法(CSBOA)与自抗扰控制(ADRC)算法结合的控制策略。首先,给出了冷却水温度控制系统的结构及数学模型,设计自抗扰控制器;其次,通过混沌蛇鹫优化算法对自抗扰控制器的部分参数迭代寻优,解决人工调整参数的问题。对系统进行了仿真和实验验证,结果表明:相比于传统PID控制,该控制系统稳态时的温度误差更小,具有更好的温度控制效果,有效避免了冷却水温度波动对金刚石薄膜制备产生的不良影响。
In view of the disadvantages of long adjustment time and poor stability of cooling water temperature control in MPCVD unit,a control strategy combining the improved chaotic secretary bird optimization algorithm(CSBOA)with the active disturbance rejection control(ADRC)algorithm is proposed.Firstly,the structure and mathematical model of the cooling water temperature control system are given,and the ADRC is designed.Secondly,the CSBOA is used to iteratively optimize some parameters of the ADRC to adjust the parameters manually.The simulation and experimental verification of the system show that in comparison with the traditional PID control,the temperature error of the proposed control system in steady state is smaller,and it has better temperature control effect,and can effectively avoid the adverse influence of the fluctuation of cooling water temperature on the preparation of diamond film.
作者
张贺斌
任天平
苏宇锋
ZHANG Hebin;REN Tianping;SU Yufeng(School of Mechanical and Power Engineering,Zhengzhou University,Zhengzhou 450001,China)
出处
《现代电子技术》
北大核心
2025年第3期104-110,共7页
Modern Electronics Technique
基金
国家自然科学基金项目(U1904169)。
