摘要
柔性石墨烯压阻传感器在健康监测及电子皮肤领域具有非常大的应用优势,制备具有良好性能的石墨烯薄膜是研制柔性石墨烯压阻传感器的关键技术之一。基于聚酰亚胺激光碳化的石墨烯制备工艺,对不同激光参数下的柔性石墨烯薄膜进行表征,探究不同激光辐射能量和激光轨迹间距对石墨烯薄膜压阻性能的影响,结果表明当激光轨迹间距为0.05 mm、激光辐射能量为33.3 J/cm^(2)时,压力为0~50 kPa区间石墨烯薄膜压阻性能最优。
Flexible graphene piezoresistive sensors have great application advantages in health monitoring and electronic skin fields,and preparing graphene thin films with good performance is one of the key technologies for developing flexible graphene piezoresistive sensors.The preparation process of graphene based on polyimide laser carbonization was used to characterize flexible graphene films under different laser parameters.The effects of different laser radiation energy and laser trajectory spacing on the piezoresistive performance of graphene films were investigated.The results show that when the laser trajectory spacing was 0.05 mm and the laser radiation energy was 33.3 J/cm^(2),the piezoresistive performance of graphene films was optimal in the pressure range of 0~50 kPa.
作者
于晓梅
刘志春
李强
高亮杰
赵鑫
王碧玲
梁军生
YU Xiaomei;LIU Zhichun;LI Qiang;GAO Liangjie;ZHAO Xin;WANG Biling;LIANG Junsheng(Dalian University of Technology,Key Laboratory for Micro/Nano Technology and System of Liaoning Province;AVIC Aerodynamics Research Institute,Aviation Key Laboratory of Science and Technology on High Speed and High Reynolds Number Aerodynamic Force Research)
出处
《仪表技术与传感器》
CSCD
北大核心
2024年第12期1-4,11,共5页
Instrument Technique and Sensor
基金
航空科学基金项目(2019ZD063001,20230012063001)
国家自然科学基金项目(51675085)。
关键词
聚酰亚胺
激光碳化
石墨烯薄膜
压阻性能
表征分析
polyimide
laser carbonization
graphene thin film
pressure resistance performance
characterization analysis
