摘要
针对已有贝塞尔光束生成方法存在的缺陷,提出一种基于压电变形镜的贝塞尔光束微孔加工新工艺,应用于大深径比微孔加工。采用新工艺,形成的微孔直径为11~16μm,侧壁孔深为1140~1930μm,深径比大于100,且深径比在一定范围内随激光脉冲能量的增大而增大。贝塞尔光束加工微孔形貌与高斯光束加工微孔形貌相比,具有细长、均匀、平滑的优点。通过聚甲基丙烯酸甲酯加工试验,证明了压电变形镜能够产生较高质量的贝塞尔光束,可应用于大深径比微孔加工。
In view of the shortcoming of the existing Bessel beam generation method,a new type of Bessel beam micro hole machining process based on piezoelectric deformation mirror was proposed,which is applied to the micro hole machining with large depth-diameter ratio.Using the new process,the diameter of the micro hole formed is 11~16μm,the depth of the side wall hole is 1140~1930μm,and the depth-diameter ratio is larger than 100,and the depth-diameter ratio increases with the increase of laser pulse energy within a certain range.Compared with the micro hole morphology of Gaussian beam machining,the micro hole morphology of Bessel beam machining has the advantages of slenderness,uniformity and smoothness.Through the PMMA machining test,it is proved that the piezoelectric deformation mirror can produce high-quality Bessel beam,which can be applied to micro hole machining with a large depth-diameter ratio.
出处
《机械制造》
2024年第12期74-77,共4页
Machinery
基金
浙江省基础公益研究计划项目(编号:LGG22E050002)
浙江省省属高校基本科研业务费专项资金资助项目(编号:SJLY2020002)
宁波市重大科技攻关项目(编号:2021Z068)。
关键词
微孔
深径比
加工
工艺
Micro Holee
Depth-diameter
Ratio Machiningg
Process
