摘要
针对目前大口径镜面无与之匹配的自动清洗设备的问题,提出了一种扇形射流自动清洗技术,对扇型喷嘴的结构、布置形式和清洗力进行了研究,喷射角度在25°~125°范围内可控,提出气液混合清洗方式,结合自动化设备,在保护镜面不受损伤的前提下,设计了一套针对大口径光学镜面的自动清洗装置,可以在1 min内完成镜面清洗。通过Zeta仪对清洗后的镜面形貌进行观测,剩余杂质颗粒直径<10μm,无凹坑、划痕等缺陷。清洗装置自动化程度高,清洁速度快,清洁效果满足加工及镀膜要求,不会损伤镜面。研究为大口径光学镜面的自动化清洗提供了一种思路。
For the current issue of the lack of suitable automatic cleaning equipment for large-aperture mirror surfaces,a fanshaped jet automatic cleaning technology was proposed.The structure,arrangement,and cleaning force of fan-shaped nozzles were studied.The spray angle was controllable within the range of 25°to 125°.An innovative gas-liquid mixed cleaning approach was proposed,and in combination with automated equipment,an automated cleaning device specifically for large-aperture optical mirrors was designed without damaging the mirror surface during the process.This device is capable of completing the mirror cleaning within 1 min.Post-cleaning surface morphology analysis using a Zeta instrument reveals that the remaining impurity particles are smaller than 10μm in diameter,without observable defects such as pits or scratches.The automated cleaning device boasts high automation,fast cleaning speed,and a cleaning effect,which meet both manufacturing and coating requirements without damaging the mirror surface.The research provides an approach for automated cleaning of large-aperture optical mirror surfaces.
作者
何其佳
彭起
侯智芸
江川
王培成
HE Qijia;PENG Qi;HOU Zhiyun;JIANG Chuan;WANG Peicheng(National Key Laboratory of Optical Field Manipulation Science and Technology,Chinese Academy of Sciences,Chengdu 610209,China;Key Laboratory of Beam Control,Chinese Academy of Sciences,Chengdu 610209,China;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《流体机械》
CSCD
北大核心
2024年第12期79-86,共8页
Fluid Machinery
基金
中国科学院重点实验室基金(CXJJ-22S008)。
关键词
大口径光学镜面清洗
自动清洗
扇形射流
喷嘴布置
cleaning of large-aperture optical mirrors
automatic cleaning
fan-shaped jet
nozzle arrangement
