摘要
光刻胶废剥离液中含有大量的水和有机溶剂,其中包含大量有回收价值的成分。从光刻胶废剥离液中回收水和有机溶剂可以减少对自然界的污染,实现资源化利用。综述了国内外几种从光刻胶废剥离液中回收水和有机溶剂常见分离方法及分离装置,并对不同情况下所产生效果进行分析比较。希望能为我国电子行业中光刻胶废剥离液的资源化处理提供借鉴。
The photoresist waste stripping liquid contains a lot of water and organic solvent,which con-tain a lot of components with recycling value.The recovery of water and organic solvent from photoresist waste stripping liquid can reduce the pollution to nature and realize resource utilization.In this paper,several common separation methods and devices for recovering water and organic solvent from photoresist waste stripping liquid at home and abroad are reviewed,and the results under different conditions are compared.It is hoped that it can provide reference for the recycling treatment of photoresist waste strip-ping liquid in China’s electronics industry.
作者
于成钢
李罡峰
傅瑞德
郭依亮
吴晗松
从海峰
李鑫钢
渠娅娟
YU Chenggang;LI Gangfeng;FU Ruide;GUO Yiliang;WU Hansong;CONG Haifeng;LI Xingang;QU Yajuan(Hebei Guokong Environmental Governance Co.,Ltd.,Shijiazhuang 050051,China;Shijiazhuang Chenghe Environmental Protection Technology Co.,Ltd.,Shijiazhuang 052560,China;School of Chemical Engineering and Technology,Tianjin University,Tianjin 300072,China;Zhejiang Institute of Tianjin University,Zhejiang Ningbo 315201,China)
出处
《化学工业与工程》
CAS
CSCD
北大核心
2024年第2期141-147,共7页
Chemical Industry and Engineering
关键词
光刻胶废剥离液
水
有机溶剂
分离回收
photoresist waste stripping liquid
water
organic solvent
separating and recovering
