摘要
为了实现对不同构型光学样品进行应力双折射分布测量,在使用双弹光调制方法的基础上,设计了一种应用于双折射分布测量的多构型扫描系统。该系统在保证测量的高分辨率的同时,通过保持激光器静止,同时使样品进行快速移动,提高了测量精度与广度。在样品测量方面,采用633 nm(1/4)玻片测试,测试相对误差的范围为0.79%~0.95%,波动范围为0.12 nm,标准差为0.0352;采用BK7玻璃样品测试,波动范围为0.25 nm,标准差为0.0389。在扫描精度方面,连续扫描精度误差不超过0.05 mm,连续寸动扫描精度误差不超过0.009 mm。对比实验结果可得出,该多构型扫描系统可有效解决对样品任一区域实现高精度应力双折射测量的问题。
In order to measure the stress birefringence distribution of optical samples with different configurations,a multi-configuration scanning system for birefringence distribution measurement was designed based on the double elastic light modulation method.The system not only ensured the high resolution of the measurement,but improved the measurement accuracy and breadth by keeping the laser stationary and making the sample move quickly.In terms of sample measurement,the 633 nm(1/4)glass was adopted to test,the relative error of the detection results was 0.79%~0.95%,with a variation range of 0.12 nm,and the standard deviation was 0.0352.The variation range of the BK7 glass sample was 0.25 nm,and the standard deviation of the experimental results was 0.0389.For scanning accuracy,the continuous scanning accuracy error does not exceed 0.05 mm,and the continuous inching scanning accuracy error is less than 0.009 mm.According to the above two experimental results,it can be concluded that the multi-configuration scanning system can effectively solve the problem of high precision stress birefringence measurement in any area of the sample.
作者
岐临凯
李克武
李坤钰
王志斌
李晋华
QI Linkai;LI Kewu;LI Kunyu;WANG Zhibin;LI Jinhua(School of Electrical and Control Engineering,North University of China,Taiyuan 030051,China;School of Instrumentation and Electronics,North University of China,Taiyuan 030051,China;Shanxi Optoelectronic Information and Instrument Engineering Technology Research Center,Taiyuan 030051,China;Institute of Frontier and Interdisciplinary Sciences,North University of China,Taiyuan 030051,China)
出处
《应用光学》
CAS
北大核心
2024年第3期608-615,共8页
Journal of Applied Optics
基金
国家自然科学基金(62205310)
山西省自然科学基金(201901D211234)。
关键词
多构型扫描系统
弹光调制
应力双折射
上位机设计
multi-configuration scanning system
elastic light modulation
stress birefringence
PC computer design
