摘要
针对永磁同步直线电机伺服控制系统容易受内参和扰力的影响以及动态响应慢的问题,提出了一种基于幂指趋近律的改进型积分滑模控制方法。该方法在传统的积分滑模控制器基础上引入非线性项和微分项参数,采用带有边界层的函数代替符号函数,来减少滑模控制器引起的抖振,以及提高动态段跟踪能力和减少超调量。仿真和实验结果表明,与传统的三闭环PID控制相比,改进型积分滑模控制算法使系统具有更好的响应性能、跟踪性能、定位精度高和强鲁棒性,满足了半导体封装设备中XY平台直线电机伺服控制系统的高速高精度运动需求。
Aiming at the problems that the servo control system of permanent magnet synchronous linear motor is easily affected by internal parameters and disturbance forces and the dynamic response is slow,an improved integral sliding mode control method based on power index approximation law is proposed.This method introduces nonlinear term and differential term parameters on the basis of traditional integral sliding mode controller,and uses the function with boundary layer instead of the sign function to reduce the chattering caused by the sliding mode controller,improve the dynamic segment tracking ability and reduce the overshoot.Simulation and experimental results show that compared with the traditional three-closed-loop PID control,the improved integral sliding mode control algorithm makes the system have better response performance,tracking performance,high positioning accuracy and strong robustness,and meets the high-speed and high-precision motion requirements of the XY platform linear motor servo control system in semiconductor packaging equipment.
作者
陈观轩
贺云波
邱国富
范文斌
吴浩苗
CHEN Guanxuan;HE Yunbo;QIU Guofu;FAN Wenbin;WU Haomiao(School of Mechatronics Engineering,Guangdong University of Technology,Guangzhou 510006,China)
出处
《组合机床与自动化加工技术》
北大核心
2023年第10期77-80,共4页
Modular Machine Tool & Automatic Manufacturing Technique
基金
国家自然科学基金项目(61973093)。
关键词
永磁同步直线电机
积分滑模
鲁棒性
高速高精度运动
permanent magnet synchronous linear motor
integral sliding mode
robustness
high-speed and high-precision motion
