摘要
Hydrogen(H_(2))is currently of strategic importance in the pursuit of a decarbonized,environmentally benign,sustainable global energy system;however,the explosive nature of H2 requires leakage monitoring to ensure safe application in industry.Therefore,H_(2) gas sensors with a high sensitivity and fast response across a wide concentration range are crucial yet technically challenging.In this work,we demonstrate a new type of MEMS differential thermopile gas sensor for the highly sensitive,rapid detection of trace H_(2) gas in air.Facilitated by a unique MiS fabrication technique,pairs of single-crystalline silicon thermopiles(i.e.,sensing and reference thermopiles)are batch fabricated with high-density single-crystalline silicon thermocouples,yielding an outstanding temperature sensitivity at the sub-mK level.Such devices ensure the detection of miniscule temperature changes due to the catalytic reaction of H_(2) with a detection limit as low as~1 ppm at an operating temperature of 120℃.The MEMS differential thermopiles also exhibit a wide linear detection range(1 ppm-2%,more than four orders of magnitude)and fast response and recovery times of 1.9 s and 1.4 s,respectively,when detecting 0.1%H_(2) in air.Moreover,the sensors show good selectivity against common combustible gases and volatile organics,good repeatability,and long-term stability.The proposed MEMS thermopile H_(2) sensors hold promise for the trace detection and early warning of H_(2) leakage in a wide range of application.
基金
support by the National Key R&D Program of China(2021YFB3200800,2021YFB3201302)
National Natural Science Foundation of China(61974155,61831021,62104241,62271473,U21A20500)
Science and Technology Innovation Plani of Shanghai(19510744600)
Scientific Instrument Project of the Chinese Academy of Sciences(YJKYYQ20210024)
Shanghai Pujiang Program(20PJ1415600)
Innovation Team and Talents Cultivation Program of National Administration of Traditional Chinese Medicine(ZYYCXTD-D-202002,ZYYCXTD-D-202003).
