摘要
本研究从原子结构角度计算磷化铟主要晶面的结构参数;利用广义胡克定律计算磷化铟杨氏模量、泊松比和剪切模量,以及通过维氏压痕实验计算磷化铟硬度和断裂韧性,研究了相力学特性参数在三维空间中的分布及在(100)晶面上沿不同晶向的变化。结果表明:杨氏模量、剪切模量和泊松比在空间中的分布具有高度对称性,其最大值和最小值分别为113.9GPa、46GPa、0.55和60.7GPa、22.3GPa、0.24;在(100)晶面上,磷化铟剪切模量表现出各向同性,硬度各向异性表现不明显,杨氏模量、泊松比和断裂韧性均具有优越的各向异性并呈现出周期性变化,且断裂韧性在[110]晶向有最小值,因而径向裂纹最易沿[110]扩展。
In order to further promote the cleavage processing technology of InP materials,the anisotropic calculation of mechanical properties of InP wafers was carried out.The structural parameters of main crystal planes of InP are calculated from the perspective of atomic structure.The Young’s modulus,Poisson’s ratio and shear modulus of InP are calculated by generalized Hooke’s law,and the hardness and fracture toughness of InP are calculated by Vickers indentation experiment.The results show that the distributions of Young’s modulus,shear modulus and Poisson’s ratio in space are highly symmetrical,and their maximum and minimum values are 113.9 GPa,46 GPa,0.55 and 60.7 GPa,22.3 GPa,0.24,respectively.On the(100)crystal plane,the shear modulus of InP show isotropy,and the anisotropy of hardness is not obvious.The Young’s modulus,Poisson’s ratio and fracture toughness have superior anisotropy and show periodic changes,and the fracture toughness reaches the minimum value in the[110]crystal direction,that is,the radial crack is most likely to expand along the[110]crystal direction.
作者
蒋金鑫
姜晨
郎小虎
高睿
黄鹏辉
JIANG Jinxin;JIANG Chen;LANG Xiaohu;GAO Rui;HUANG Penghui(College of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Shanghai Nanpre Mechanics Co.,Ltd.,Shanghai 201203,China)
出处
《材料科学与工程学报》
CAS
CSCD
北大核心
2023年第3期359-365,共7页
Journal of Materials Science and Engineering
基金
国家自然科学基金面上资助项目(51475310)。
关键词
磷化铟
力学特性
各向异性
压痕实验
InP
Mechanical properties
Anisotropy
Indentation test
