摘要
洁净室环境中,尘埃粒子计数器通常用于监测生产线的颗粒污染,其检测结果是洁净室洁净度等级划分的依据。由于空气中不同大小的颗粒存在不同的相关风险,颗粒的数量、大小的检测及检测结果的准确性,对保证生产质量至关重要,因此,需进行定期校准。本文依据ISO 21501-4:2018,对其检测、校准过程中遇到的问题进行分析和探讨。
In clean room environment,dust particle counter is usually used to monitor the particle pollution of the production line,and its detection results are the basis for the classification of clean room cleanliness.As different si-zes of particles in the air have different risks,the quantity and size of particles and the accuracy of test results are crucial to ensure production quality,so regular calibration is needed.In this paper,according to ISO 21501-4:18,the problems encountered in the process of detection and calibration are analyzed and discussed.
作者
暴海霞
厉龙
吴振一
韦恩泽
史苏娟
管瑛
BAO Haixia;LI Long;WU Zhenyi;WEI Enze;SHI Sujuan;GUAN Ying
出处
《计量与测试技术》
2023年第6期22-24,共3页
Metrology & Measurement Technique
基金
江苏省市场监督管理局科技项目(项目名称:尘埃粒子计数器宏粒子与超微粒子校准溯源研究,项目编号:KJ21125014)。
