摘要
高功率大能量窄脉宽的高峰值功率激光广泛应用于材料加工、科学研究等领域。综述了目前获得高功率大能量全固态超短脉冲激光输出的圆棒、板条、薄片放大器以及在半导体加工等领域极具应用前景的高功率大能量全固态调Q激光器国内外最新研究进展。
High-power,high-energy and narrow pulse laser is widely employed in the various areas such as material processing and scientific research.The present research status of rod,slab and thin-disk amplifiers that obtain high-power and high-energy all-solid-state ultrashort pulse laser output,as well as Q-switched lasers with great application prospects in the field of semiconductor processing are introduced in details.
作者
相贺鹏
陈檬
郑锦灿
张犁天
XIANG Hepeng;CHEN Meng;ZHENG Jincan;ZHANG Litian(Institute of Laser Engineering,Faculty of Materials and Manufacturing,Beijing University of Technology,Beijing,China)
出处
《光电技术应用》
2023年第3期1-15,21,共16页
Electro-Optic Technology Application
基金
国家自然科学基金天文联合基金重点项目(U1631240)。
