摘要
In this paper,the design and experimental results for a novel high-stability sounding electrostatic field micro sensor are presented.By means of hermetic chip sealing,digital weak signal demodulation unit,and probe sensor structure design,harsh environmental adaptation problems such as low temperature,high humidity,low air pressure,waterfall are solved.The sensor has a high resolution of 14 V/m,a wide measurement range of±100 kV/m,and is proved to have superior stability and performance in sounding electric field experiments than traditional sensors under different kinds of weather.
基金
Supported by the National High Technology Research and Development Program of China(863 Program,2011AA040405)
the National Natural Science Foundation of China(No.61201078,No.61302032,No.61327810).
