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氧化石墨烯在半导体加工用O形圈全氟醚橡胶材料中的应用 被引量:5

Application of Graphene Oxide in Perfluoroether Rubber Materials of O-ring for Semiconductor Processing
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摘要 研究氧化石墨烯(GO)用量对GO/全氟醚橡胶(FFKM)复合材料物理性能、压缩永久变形和耐介质性能的影响。结果表明:随着GO用量的增大,GO/FFKM复合材料的邵尔A型硬度和高温压缩永久变形变化不大,拉伸强度和撕裂强度先增大后减小;当GO用量为1份时,GO/FFKM复合材料的拉伸强度和撕裂强度最大,耐介质性能较好。GO/FFKM复合材料适用于制备半导体加工用O形圈。 The effects of the dosage of graphene oxide(GO) on the physical properties,compression set and dielectric resistance of GO/perfluoroether rubber(FFKM) composites were studied. The results showed that with the increase the dosage of GO,the shore A hardness and high temperature compression set of the GO/FFKM composites changed little,and the tensile strength and tear strength increased at first and then decreased. When the dosage of GO was 1 phr,the tensile strength and tear strength of the GO/FFKM composites were the largest and the dielectric resistance was better. The GO/FFKM composites were suitable for the O-rings for semiconductor processing.
作者 张世鑫 魏海东 储民 ZHANG Shixin;WEI Haidong;CHU Min(Zhejiang Chuangcheng Polymer Material Co.,Ltd,Shaoxing 310000,China;Beijing Research and Design Institute of Rubber Industry Co.,Ltd,Beijing 100143,China)
出处 《橡胶工业》 CAS 2022年第4期279-283,共5页 China Rubber Industry
关键词 氧化石墨烯 全氟醚橡胶 复合材料 O形圈 压缩永久变形 耐介质性能 graphene oxide perfluoroether rubber composite O-ring compression set dielectric resistance
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