摘要
磁控溅射法制备的重稀土涂层均匀、厚度可控,可以显著提升和控制晶界扩散磁体的矫顽力。本文研究了磁控溅射工艺参数与Tb涂层均匀性的关系,定量分析了Tb涂层厚度控制及其对铈磁体矫顽力的提升作用。当沉积速率为3.23~3.65×10^(-3)mg/(mm^(2)·min)时,涂层的均匀性最佳,涂层厚度与溅射时间成正比关系。Tb涂层厚度为4.87μm时,晶界扩散铈磁体矫顽力从11.80 kOe提升至16.56 kOe,矫顽力温度系数为-0.373%/℃。
Homogenous heavy rare earth coating can be prepared and its thickness controlled by the magnetron sputtering method.In this paper,relationship between the Tb coating homogenization and parameters of magnetron sputtering was investigated,the Tb coating thickness control and coercivity improvement of cerium magnets was quantitative analyzed.The optimal homogenous Tb coating can be obtained when deposition rate was 3.23-3.65×10^(-3) mg/(mm^(2)·min),and the coating thickness is proportional to sputtering time.When the Tb coating thickness was 4.87μm,the coercivity of grain boundary diffused cerium magnets improved from 11.80 kOe to 16.56 kOe,and the temperature coefficient of coercivity was-0.373%/℃.
作者
陈鑫烁
冯海波
李安华
CHEN Xinshuo;FENG Haibo;LI Anhua(Division of Functional Materials,Central Iron&Steel Research Institute,Beijing 100081)
出处
《粉末冶金工业》
CAS
北大核心
2021年第6期110-114,共5页
Powder Metallurgy Industry
基金
国家自然科学基金资助项目(51590882,51331003)。
关键词
磁控溅射
Tb涂层
磁体
晶界扩散
矫顽力
magnetron sputtering
Tb coating
magnet
grain boundary diffusion
coercivity
