摘要
为研究基于单面刻蚀的微机电系统制造工艺对模态局部化加速度计的影响,通过分析释放和刻蚀工艺对模态局部化加速度计结构的影响以及对加速度计幅频特性和初始工作点的影响研究了粘附和根切对模态局部化加速度计的影响。结果表明:释放氧化层时由于液体张力的存在极易使得器件层与基底层发生粘附,导致器件失效;根切会导致谐振器之间的质量差异,从而导致加速度计初始幅值比较大的漂移,增加了信号检测的难度。可见基于单面刻蚀的微机电系统制造工艺会增加模态局部化加速度计传感器的不确定性。
In order to research the effect of micro-electromechanical systems(MEMS)fabrication process based on one side etching on mode-localized accelerometer,effects of adhesion and footing on mode-localized accelerometer was investigated by analyzing the effect of release and etching on the device structure,amplitude-frequency characteristic and initial working point.The results show that when the oxide layer is released,the device layer is easily adhered to the substrate due to the presence of the liquid tension,thus,the device failure happens.And the mass mismatch of the weakly coupled resonators is induced by the footing phenomenon,then a large initial amplitude ratio drift is generated and it is difficult to measure the signal.It is concluded that uncertainty of mode-localized acce-lerometer is induced by the MEMS fabrication process based on one side etching.
作者
康昊
苏健军
常洪龙
KANG Hao;SU Jian-jun;CHANG Hong-long(Xi’an Modern Chemistry Rsearch Institute,Xi’an 710065,China;School of Mechanical and Electrical Engineering,Northwestern Polytechnical University,Xi’an 710072,China)
出处
《科学技术与工程》
北大核心
2021年第35期15108-15113,共6页
Science Technology and Engineering
基金
宁波市自然科学基金(202003N4045)。
关键词
微机电系统
模态局部化
加速度计
根切
粘附
micro-electromechanical systems(MEMS)
mode-localized
accelerometer
footing
adhesion
