摘要
提出了一种螺旋悬臂梁结构的可植入式压电能量收集器,这种结构的能量收集器可为植入式医疗器件供电。螺旋结构的设计一方面可以使悬臂梁从多个方向的振动中吸收能量,另一方面还可以降低谐振频率。提出的悬臂梁整体结构厚度为40μm,宽度为1mm,整体外部大小为9mm×9mm。该结构中,悬臂梁的末端附上质量块,进一步降低悬臂梁的谐振频率。该收集器的谐振频率为66Hz,当施加的激励为1g加速度时,输出开路电压为2.2V,输出功率为4.8μW。
An implantable piezoelectric energy harvester with a spiral cantilever beam structure was designed,which could provide power for implantable medical devices.On the one hand,the design of the spiral structure could make the cantilever beam absorb energy from vibration in multiple directions,and on the other hand,it could also reduce the resonance frequency.The overall thickness of the cantilever beam mentioned in this work was 40μm,the width was 1mm,and the overall external size was 9mm×9mm.In this structure,a mass block was attached to the end of the cantilever beam to further reduce the resonance frequency of the cantilever beam.The resonant frequency of the collector was 66Hz.When the applied excitation was 1g of acceleration,the output open-circuit voltage was 2.2V,and the output power was 4.8μW.
作者
薛至诚
张顺毅
惠文龙
王德波
XUE Zhicheng;ZHANG Shunyi;HUI Wenlong;WANG Debo(College of Elec.and Optical Engineer.&College of Microelec.,Nanjing Univ.of Posts and Telecommun.,Nanjing210023,P.R.China)
出处
《微电子学》
CAS
北大核心
2021年第5期729-733,共5页
Microelectronics
基金
国家青年自然科学基金资助项目(61704086)
中国博士后科学基金资助项目(2017M621692)
江苏省博士后基金资助项目(1701131B)。
关键词
螺旋
悬臂梁
压电能量收集器
植入式
spiral
cantilever
piezoelectric energy harvester
implantable
