摘要
静电负刚度调谐加速度计(EFMA)在设计原理上具有兼顾电容式加速度计和谐振式加速度计相关优点的潜力。然而由于静电刚度对应的极板位移具有明显的非线性效应,使得EFMA在大量程应用中标度因数非线性较差,成为了当前制约EFMA量程提升的重要因素。基于EFMA频率输出的特点,推导了力平衡控制量并开展了力平衡控制环路的设计与研究;结合EFMA敏感器件完成实验室样机的调试与性能测试,对比了有、无力平衡闭环检测电路的量程与标度因数非线性,在保证EFMA零偏稳定性、标度因数稳定性不受影响的情况下将其标度因数从5 Hz/g提升到了24.5 Hz/g,量程从±1 g提升到了±25 g,结果验证了基于频率检测的力平衡闭环检测控制方法的可行性和优越性。
The electrostatic negative stiffness frequency modulation accelerometer(EFMA)has the potential to take into account the advantages of capacitive accelerometers and resonant accelerometers in terms of design principles.However,due to the obvious nonlinear effect of the plate displacement corresponding to the electrostatic stiffness,the poor nonlinear of the scale factor of EFMA in large range of applications has become an important factor restricting the promotion of EFMA range at present.Based on the characteristics of EFMA frequency output,the force balance control value is derived.The design and research of force balance control loop is carried out.The debugging and performance test of the laboratory prototype are completed with EFMA sensitive devices.The circuit range and scale of the closed-loop detection with and without balance are compared.The factor is reduced,and the scale factor of EFMA is increased from 5 Hz/g to 24.5 Hz/g,and the range is increased from±1 g to±25 g while ensuring the bias stability of EFMA and the constant scale factor.The results demonstrate the feasibility and superiority of the force balance closed-loop detection and control method based on frequency detection.
作者
张晶
刘雨东
王皓
苏岩
朱欣华
ZHANG Jing;LIU Yudong;WANG Hao;SU Yan;ZHU Xinhua(Nanjing University of Science and Technology,School Hao of Mechanical Engineering,Nanjing 210094,China)
出处
《中国惯性技术学报》
EI
CSCD
北大核心
2021年第3期374-380,共7页
Journal of Chinese Inertial Technology
基金
江苏省自然科学基金(青年基金)(BK20190417)
南京理工大学自主科研专项(30920021110)
机械工程学院青年人才助推计划(309201B8805)。
关键词
静电负刚度调谐加速度计
闭环检测
力平衡控制
标度因数非线性
electrostatic negative stiffness frequency modulation accelerometer
closed loop detection
force balance control
scale factor nonlinearity
