摘要
针对CG6000型直拉硅单晶炉数据运用效率低、难以实时存储和设备管理分散问题,设计应用串口通信的单晶炉数据采集系统,实现单晶拉制全工艺过程的实时数据采集。以SQL Server构建的单晶拉制数据库作为数据源,采用Datawin组态软件进行界面数据展示和开发。实际应用表明:该系统易于搭建、运行稳定,可以满足企业对单晶硅拉制参数的集中监控、存储、展示、分析及验证等多种实际需求。
Considering low efficiency of data utilization,difficulty in save at real time and dispersal device management of the CG6000 single crystal furnace,a single crystal furnace data acquisition system based on serial communication was designed to collect real-time data in single crystal pulling process.In addition,having SQL Server-built single-crystal pulling database taken as the data source,and Datawin configuration software adopted to develop and display interface data.The practical application showed that,the system designed is easy to build and runs stably and it can meet the requirements of integrated monitoring,storage display,analysis and verification of monocrystalline silicon pulling parameters.
作者
吴彦国
张明亮
令狐铁兵
WU Yan-guo;ZHANG Ming-liang;LINGHU Tie-bing(MCL Electronic Materials Co.,Ltd.)
出处
《化工自动化及仪表》
CAS
2021年第3期264-267,共4页
Control and Instruments in Chemical Industry
关键词
数据采集系统
直拉硅单晶炉
串口通信
Datawin组态软件
网络化管控
data acquisition system
CZ-Si single crystal furnace
serial communication
Datawin configuration software
networked control
