摘要
根据晶圆自旋转磨削的特点,建立了基于模糊PID控制的精密磨削控制系统,该系统主要是通过模糊PID的方法调节磨削进给速度,以实现磨削时对磨削力的控制,并与普通模式进行了实验对比。实验结果表明,基于模糊PID控制算法的精磨磨削能够获得更稳定的磨削力和更高的磨削效率。
According to the characteristics of wafer In-Feed grinding,a precision grinding control system based on fuzzy-PID control is established.The system mainly uses fuzzy-PID method to adjust the grinding feed speed to control the grinding force during grinding,and compared with normal grinding control model experiment.The experimental results show that the precision grinding control system based on fuzzy-PID control algorithm can be obtained more stable grinding force and higher grinding efficiency.
作者
杨生荣
王克江
白阳
孙彬
YANG Shengrong;WANG Kejiang;BAI Yang;SUN Bin(CETC Beijing Electronic Equipment Co.,Ltd.,Beijing 100176,China)
出处
《电子工业专用设备》
2021年第2期1-4,56,共5页
Equipment for Electronic Products Manufacturing
