摘要
设计、安装调试了一台微团簇离子源 ,其原理是气体放电与磁控溅射相结合产生溅射粒子 ,溅射产生的粒子经过一低真空区时 ,经历液氮冷凝和复杂的碰撞 ,形成微团簇离子 ,后经高压电场引出 ,测得离子混合束的总强度 .微团簇离子束经一分析磁场 ,得到 C+ n 和 Al+ n 的质谱 。
A microcluster ion source has been designed and set up. It adopts the principle of gas discharge and magnetic control sputtering. After the sputtering,the particles pass through a low vacuum area,encountering complicated collision and condensed in a low temperature environment caused by a liquid nitrogen vessel,and some of them become energetic clusters via extractive electric field,and the current of its total beam has gained. Mass spectrum analysis shows that the beam contains microclusters with the satisfying intensity. In this paper,the experimental results have also been discussed.
出处
《兰州大学学报（自然科学版）》
CAS
CSCD
北大核心
2002年第5期28-32,共5页
Journal of Lanzhou University(Natural Sciences)
