摘要
利用磁控溅射(PVD)、化学气相沉积(CVD)以及热扩散渗硅方法在TC4钛合金表面制备WSi2/W5Si3复合涂层。采用X射线衍射仪、扫描电镜、能谱仪对复合涂层的结构、组织形貌以及微区化学成分进行分析;对复合涂层显微硬度、附着力以及耐磨性进行测试。结果表明:WSi2/W5Si3复合涂层的WSi2层和W5Si3层厚度分别为20、56μm,显微硬度平均值分别为10.70和8.32 GPa;WSi2/W5Si3复合涂层与基体结合力为171.6 N;WSi2/W5Si3复合涂层表面摩擦因数为0.75,磨损率为1.184×10^-6 mm 3·mm^-1。在TC4钛合金表面制备的WSi2/W 5Si3复合涂层结构均匀致密,与基体结合良好。
The WSi2/W5Si3 composite coating was prepared on the surface of the TC4 titanium alloy by magnetron sputtering(PVD),chemical vapor deposition(CVD)and thermal diffusion siliconizing method.The X-ray diffracto-meter,scanning electron microscope and energy spectrometer were used to analyze the structure,morphology and microdomain chemical composition of the composite coating.The microhardness,adhesion and wear resistance of the composite coating were tested.The results show that the thickness of the WSi2 layer and W5Si3 layer of the WSi2/W5Si3 composite coating is 20μm and 56μm,and the average microhardness is 10.70 GPa and 8.32 GPa respectively.The bonding force between WSi2/W5Si3 composite coating in substrate is 171.6 N.The surface friction factor of the WSi2/W5Si3 composite coating is 0.75,and the wear rate is 1.184×10^-6 mm 3·mm^-1.The WSi2/W5Si3 composite coating prepared on the surface of TC4 titanium alloy has a uniform and dense structure,and it is well combined with the substrate.
作者
吴龙
马捷
魏建忠
李洪义
Wu Long;Ma Jie;Wei Jianzhong;Li Hongyi(Beijing University of Technology,Beijing 100124,China)
出处
《钛工业进展》
CAS
北大核心
2020年第5期18-22,共5页
Titanium Industry Progress
关键词
钛合金
化学气相沉积
复合涂层
结合力
耐磨性
titanium alloy
chemical vapor deposition
composite coating
bonding force
wear resistance
