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2.7米标准球面检验镜支撑优化设计 被引量:3

Optimal design of a 2.7 m standard spherical inspection mirror support
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摘要 球面检验镜口径不断增大导致其检验精度下降,针对该问题,本文优化设计了2.7米标准球面镜的重锤支撑参数,并对该标准球面镜的调整架以及支撑系统进行了结构设计。首先,利用有限元和遗传算法,对镜体进行了54点等力支撑环带优化,针对增加嵌套孔后镜体刚度变差的情况,对各环带底支撑力和侧支撑力分别进行了优化;然后,利用统计方法分析了支撑半径和支撑力误差对支撑变形的影响;最后,基于优化分析结果对标准检验镜的调整架和支撑系统进行了结构设计。分析结果表明,经过对标准球面镜54点支撑位置、各环带底支撑力和侧支撑力进行优化设计后,在球面镜支撑变形RMS(Root Mean Square)小于1/115λ(λ=632.8 nm),底支撑位置扰动为±2 mm,侧支撑位置扰动为±0.6 mm,以及支撑力扰动为±3 N的情况下,支撑变形小于1/70λ,满足标准球面镜的支撑要求。 Aiming at the problem that the decrease of inspection accuracy caused by an increase in the diameter of a spherical inspection mirror,the weight support parameters of the 2.7-meter standard spherical mirror are optimized and the structural design of its adjustment frame and support system is implemented.Firstly,the 54-point equal-force support ring is optimized for the mirror body using a finite element and genetic algorithm.In order to increase the rigidity of the mirror body when increasing the nesting hole,the bottom support force and the side support force of each ring are optimized separately and the influence of support radius and support force error on the support deformation is statistically analyzed.Finally,based on the analysis results,a structural frame of the standard inspection mirror and a support system are designed.The analysis results show that after optimization of the 54-point support position of the standard spherical mirror,the bottom support force and the side support force of each ring and under the condition that the spherical mirror support deformation is less than 1/115λ(λ=632.8 nm),the bottom support position is disturbed by±2 mm,the side support position is disturbed by±0.6 mm,and the support force disturbance is±3 N,the support deformation is less than 1/70λ,which shows little deterioration.This meets the requirements of standard spherical mirror support.
作者 高婧婧 焦长君 黄屾 张真 毕勇 GAO Jing-jing;JIAO Chang-jun;HUANG Shen;ZHANG Zhen;BI Yong(Nanjing Research Centre of Astronomical Instruments,Chinese Academy of Sciences,Nanjing 210042,China;University of Science and Technology of China,Hefei 230026,China;Nanjing Astronomical Instruments Ltd.,Chinese Academy of Sciences,Nanjing 210042,China)
出处 《中国光学》 EI CAS CSCD 北大核心 2020年第4期805-813,共9页 Chinese Optics
基金 江苏省自然科学基金资助项目(No.BK20181125)。
关键词 标准球面镜 重锤支撑 优化设计 扰动分析 standard spherical mirror heavy hammer support optimized design disturbance analysis
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