期刊文献+

考虑应力分布约束的压电全向加速度计梁结构优化设计 被引量:1

Optimization of supporting beams of piezoelectric omnidirectional accelerometer under stress constraint
在线阅读 下载PDF
导出
摘要 针对全向加速度计柔性支撑结构应力集中问题,以压电加速度计高灵敏度为目标,建立了考虑应力分布状态的新型全向加速度计柔性支撑结构优化设计模型。借助遗传算法,通过协同优化初始长度15 mm压电曲梁不同部位的曲率和直径,得到了具有变截面特征的压电全向加速度计曲梁支撑结构。数值实验结果表明,所得到的3压电曲梁支撑加速度计解算的全向灵敏度为传统3直梁支撑加速度计的2.5倍,且结构的最大应力仅为传统直梁结构的70%~90%。由于应力降低,曲梁加速度计的加速度线性测量范围扩大为传统直梁加速度计的1.2倍。在1~81 Hz加速度下,曲梁加速度计解算的全向灵敏度为0.7~1.3 V/g,为直梁加速度计的1.6~2.9倍。该设计解决了通过直接改变梁结构形式难以实现传统梁结构加速度计高灵敏低应力响应的问题。 To solve the problem regardingthe stress concentration offlexible supporting structures of omnidirectional accelerometers,an optimization model was established herein,considering the constraint of the stress distribution.By means of optimizing the curvatures and diameters of different parts of a piezoelectric curved beam,a novel axially polarized optimized omnidirectional accelerometer with a curved beam of variable crosssection was obtained using the genetic algorithm.The numerical results show that the omnidirectional sensitivity of the optimized curved-beam accelerometer is 2.5 times that of the initial straight-beam accelerometer,and its maximum stress is 0.7-0.9 times that of the initial straight-beam accelerometer.Therefore,the linear measurement range of the curved-beam accelerometer is 1.2 times that of the initial straight-beam accelerometer.The omnidirectional sensitivity of the curved-beam accelerometer is 0.7-1.3 V/g under acceleration in the range of 1-81 Hz.Overall,the design method forthe curved-beam accelerometer can overcome the difficultiespresented regardingoptimization of the sensitivity and stress distribution simultaneously.
作者 王岩 赵剑 夏阳 刘蓬勃 WANG Yan;ZHAO Jian;XIA Yang;LIU Peng-bo(School of Automotive Engineering, Dalian University of Technology, Dalian 116081, China)
机构地区 大连理工大学
出处 《光学精密工程》 EI CAS CSCD 北大核心 2020年第8期1751-1760,共10页 Optics and Precision Engineering
基金 国家自然科学基金资助项目(No.U1930206) 国家自然科学基金资助项目(No.61874019) 国家重点研发计划资助项目(No.2018YFA0703200)。
关键词 灵敏度 应力 压电 曲梁 全向加速度计 sensitivity stress piezoelectric curved beam omnidirectional accelerometer
  • 相关文献

参考文献3

二级参考文献17

  • 1王帆,董景新,赵淑明,严斌.硅微振梁式加速度计抗温漂的微结构及工艺设计[J].中国惯性技术学报,2014,12(2):227-232. 被引量:5
  • 2王岩,张玲,邢朝洋.硅微谐振加速度计高精度相位闭环控制系统设计与实现[J].中国惯性技术学报,2014,12(5):688-692. 被引量:7
  • 3HOPKINS R, MIOLA J, SETTERLUND R, et al.. The silicon oscillating accelerometer: a high- performance MEMS accelerometer for precision navigation and strategic guidance applications [C]. Proceedings of the 61st Annual Meeting of The Institute of Navigation, Cambridge, MA : NTM, 2005:1043-1052.
  • 4HUANG L, YANG H, GAO Y, et al.. Design and implementation of a micromechanical silicon resonant accelerometer [J]. Sensors, 2013, 13 (11) .. 15785-15804.
  • 5DONG J H, QIU A P, SHI R. Temperature influ- ence mechanism of micromechanical silicon oscilla- ting accelerometer [C]. Power Engineering and Automation Conference (PEAM), Wuhan, P. R. China..IEEE, 2011 ..385-389.
  • 6LIUJ, HUANG Q A, SHANG J, etal.. A new process to fabricate cavities in Pyrex7740 glass for high density packaging of micro-system [C]. Inter- national Conference on Electronic Packaging Tech- nology High Density Packaging (ICEPT-HDP 2008), Shanghai, P.R. China:IEEE, 2008:1-4.
  • 7MichelN S. Force multiplier in a microelectrome- chanical silicon oscillating accelerometer [ D]. Cambridge: Massachusetts Institute of Technolo- gy, 2000.
  • 8徐永青,杨拥军.硅MEMS器件加工技术及展望[J].微纳电子技术,2010,47(7):425-431. 被引量:24
  • 9石然,裘安萍,苏岩.硅微谐振式加速度计的实现及性能测试[J].光学精密工程,2010,18(12):2583-2589. 被引量:20
  • 10董景新,曹宇,万蔡辛,胡淏.硅微谐振式加速度计2种谐振结构比较[J].清华大学学报(自然科学版),2010,50(11):1825-1828. 被引量:4

共引文献23

同被引文献9

引证文献1

二级引证文献12

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部